JPS5389671A - Continuous treating apparatus - Google Patents

Continuous treating apparatus

Info

Publication number
JPS5389671A
JPS5389671A JP395377A JP395377A JPS5389671A JP S5389671 A JPS5389671 A JP S5389671A JP 395377 A JP395377 A JP 395377A JP 395377 A JP395377 A JP 395377A JP S5389671 A JPS5389671 A JP S5389671A
Authority
JP
Japan
Prior art keywords
treating apparatus
continuous treating
continuous
letting
revolution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP395377A
Other languages
Japanese (ja)
Inventor
Masakuni Akiba
Hiroto Nagatomo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP395377A priority Critical patent/JPS5389671A/en
Publication of JPS5389671A publication Critical patent/JPS5389671A/en
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE: To perform continuous treatment by letting the revolution and horizontal travel of the objects to be treated be performed by separate driving systems.
COPYRIGHT: (C)1978,JPO&Japio
JP395377A 1977-01-19 1977-01-19 Continuous treating apparatus Pending JPS5389671A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP395377A JPS5389671A (en) 1977-01-19 1977-01-19 Continuous treating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP395377A JPS5389671A (en) 1977-01-19 1977-01-19 Continuous treating apparatus

Publications (1)

Publication Number Publication Date
JPS5389671A true JPS5389671A (en) 1978-08-07

Family

ID=11571460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP395377A Pending JPS5389671A (en) 1977-01-19 1977-01-19 Continuous treating apparatus

Country Status (1)

Country Link
JP (1) JPS5389671A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5585026A (en) * 1978-12-22 1980-06-26 Hitachi Ltd Cleaning device
JPS5756930A (en) * 1980-09-22 1982-04-05 Mitsubishi Electric Corp Wafer washing and drying device
JPS57501257A (en) * 1980-03-06 1982-07-15
JPS58134441A (en) * 1982-02-04 1983-08-10 Fujitsu Ltd Treating device for wafer

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5585026A (en) * 1978-12-22 1980-06-26 Hitachi Ltd Cleaning device
JPS57501257A (en) * 1980-03-06 1982-07-15
JPS5756930A (en) * 1980-09-22 1982-04-05 Mitsubishi Electric Corp Wafer washing and drying device
JPS6317224B2 (en) * 1980-09-22 1988-04-13 Mitsubishi Electric Corp
JPS58134441A (en) * 1982-02-04 1983-08-10 Fujitsu Ltd Treating device for wafer

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