JPS5422777A - Invertible processing device - Google Patents

Invertible processing device

Info

Publication number
JPS5422777A
JPS5422777A JP8738277A JP8738277A JPS5422777A JP S5422777 A JPS5422777 A JP S5422777A JP 8738277 A JP8738277 A JP 8738277A JP 8738277 A JP8738277 A JP 8738277A JP S5422777 A JPS5422777 A JP S5422777A
Authority
JP
Japan
Prior art keywords
invertible
processing device
treating
shorten
turning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8738277A
Other languages
Japanese (ja)
Inventor
Masato Ishioka
Yoshiharu Shigyo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8738277A priority Critical patent/JPS5422777A/en
Publication of JPS5422777A publication Critical patent/JPS5422777A/en
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To ensure a uniform coating of the treating solution as well as to shorten the treating time by turning the treatment stand forward and backward alternately.
COPYRIGHT: (C)1979,JPO&Japio
JP8738277A 1977-07-22 1977-07-22 Invertible processing device Pending JPS5422777A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8738277A JPS5422777A (en) 1977-07-22 1977-07-22 Invertible processing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8738277A JPS5422777A (en) 1977-07-22 1977-07-22 Invertible processing device

Publications (1)

Publication Number Publication Date
JPS5422777A true JPS5422777A (en) 1979-02-20

Family

ID=13913339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8738277A Pending JPS5422777A (en) 1977-07-22 1977-07-22 Invertible processing device

Country Status (1)

Country Link
JP (1) JPS5422777A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS598340A (en) * 1982-07-06 1984-01-17 Mitsubishi Electric Corp Forming method for protective film of semiconductor device
US4456500A (en) * 1982-03-02 1984-06-26 Nippon Tenshashi Kabushiki Kaisha Method of manufacturing a polisher
JPS61111546A (en) * 1984-11-05 1986-05-29 Yamagata Nippon Denki Kk Semiconductor etching device
JPS61112319A (en) * 1984-11-07 1986-05-30 Nec Kyushu Ltd Developing device
JPS61236543A (en) * 1985-04-12 1986-10-21 Internatl Rectifier Corp Japan Ltd Photoresist coating apparatus
JPS6278820A (en) * 1985-10-01 1987-04-11 Rohm Co Ltd Resist developing method
JPH024986A (en) * 1987-10-31 1990-01-09 Dainippon Screen Mfg Co Ltd Surface treatment of substrate

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4456500A (en) * 1982-03-02 1984-06-26 Nippon Tenshashi Kabushiki Kaisha Method of manufacturing a polisher
JPS598340A (en) * 1982-07-06 1984-01-17 Mitsubishi Electric Corp Forming method for protective film of semiconductor device
JPS61111546A (en) * 1984-11-05 1986-05-29 Yamagata Nippon Denki Kk Semiconductor etching device
JPS61112319A (en) * 1984-11-07 1986-05-30 Nec Kyushu Ltd Developing device
JPS61236543A (en) * 1985-04-12 1986-10-21 Internatl Rectifier Corp Japan Ltd Photoresist coating apparatus
JPS6278820A (en) * 1985-10-01 1987-04-11 Rohm Co Ltd Resist developing method
JPH0543172B2 (en) * 1985-10-01 1993-06-30 Rohm Kk
JPH024986A (en) * 1987-10-31 1990-01-09 Dainippon Screen Mfg Co Ltd Surface treatment of substrate

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