JPS5585026A - Cleaning device - Google Patents
Cleaning deviceInfo
- Publication number
- JPS5585026A JPS5585026A JP15749378A JP15749378A JPS5585026A JP S5585026 A JPS5585026 A JP S5585026A JP 15749378 A JP15749378 A JP 15749378A JP 15749378 A JP15749378 A JP 15749378A JP S5585026 A JPS5585026 A JP S5585026A
- Authority
- JP
- Japan
- Prior art keywords
- unit
- frame
- pure water
- air blowing
- temperature air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE: To eliminate the organic and inorganic contaminations of a semiconductor device by constructing a cleaning device for cleaning the semiconductor before it is sealed the cleaning device comprising an organic solvent cleaning unit, a pure water cleaning unit, a normal temperature air blowing unit and a high temperature air blowing drying unit.
CONSTITUTION: A completely assembled lead frame is supplied to a frame loader 1, and sequentially fed along a frame guide to right side. The lead frame is first fed into a chlorofluoromethane spray unit 2, sprayed with the chlorofluoromethane liquid elevationally from a spray nozzle 9, and blown from the liquid through a normal temperature air blowing unit 3. Then, after the frame is washed with pure water at a pure water cleaning unit 4, it is fed to normal temperature air blowing units 5 and 6 to remove pure water adhered to the lead frame therefrom. Finally, the element, lead frame are completely dried at a hot air blower 14, and then contained in a frame unloader 8.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15749378A JPS5585026A (en) | 1978-12-22 | 1978-12-22 | Cleaning device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15749378A JPS5585026A (en) | 1978-12-22 | 1978-12-22 | Cleaning device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5585026A true JPS5585026A (en) | 1980-06-26 |
Family
ID=15650885
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15749378A Pending JPS5585026A (en) | 1978-12-22 | 1978-12-22 | Cleaning device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5585026A (en) |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58135643A (en) * | 1982-02-08 | 1983-08-12 | Nippon Telegr & Teleph Corp <Ntt> | Wafer cleaner |
JPS5931241U (en) * | 1982-08-23 | 1984-02-27 | スピ−ドフアム株式会社 | drying equipment |
JPS59166885U (en) * | 1983-04-25 | 1984-11-08 | 宮崎 三郎 | cleaning equipment |
JPS6159837A (en) * | 1984-08-31 | 1986-03-27 | Toshiba Ceramics Co Ltd | Continuous washing device of wafer |
JPH04126578A (en) * | 1990-09-18 | 1992-04-27 | Japan Field Kk | Cleaning method and apparatus for cleaning object using nonaqueous flammable solvent |
EP0490501A2 (en) * | 1990-12-11 | 1992-06-17 | Imperial Chemical Industries Plc | Cleaning of articles |
JPH062182A (en) * | 1992-04-20 | 1994-01-11 | Mitsubishi Kasei Corp | Oil deposition washing method, washing device and detergent |
JPH0612468U (en) * | 1992-02-20 | 1994-02-18 | 株式会社精工舎 | Washing / drying device |
JPH06256984A (en) * | 1993-12-21 | 1994-09-13 | Mitsubishi Kasei Corp | Washing device for object stained with oil |
JPH06256983A (en) * | 1993-12-16 | 1994-09-13 | Mitsubishi Kasei Corp | Washing device for object stained with oil |
JPH0686336U (en) * | 1993-05-21 | 1994-12-13 | 住友精密工業株式会社 | Carrier cleaning equipment |
JPH073481A (en) * | 1993-12-21 | 1995-01-06 | Mitsubishi Chem Corp | Equipment for cleaning greasy parts |
JPH078870A (en) * | 1993-06-29 | 1995-01-13 | Koi Seisakusho:Kk | Method and device for washing and drying hydrocarbon washing liquid |
JPH07100444A (en) * | 1993-10-06 | 1995-04-18 | Hitachi Zosen Corp | Method and device for cleaning |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5389671A (en) * | 1977-01-19 | 1978-08-07 | Hitachi Ltd | Continuous treating apparatus |
-
1978
- 1978-12-22 JP JP15749378A patent/JPS5585026A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5389671A (en) * | 1977-01-19 | 1978-08-07 | Hitachi Ltd | Continuous treating apparatus |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58135643A (en) * | 1982-02-08 | 1983-08-12 | Nippon Telegr & Teleph Corp <Ntt> | Wafer cleaner |
JPH045264B2 (en) * | 1982-02-08 | 1992-01-30 | ||
JPS5931241U (en) * | 1982-08-23 | 1984-02-27 | スピ−ドフアム株式会社 | drying equipment |
JPS6242534Y2 (en) * | 1982-08-23 | 1987-10-31 | ||
JPS59166885U (en) * | 1983-04-25 | 1984-11-08 | 宮崎 三郎 | cleaning equipment |
JPS6159837A (en) * | 1984-08-31 | 1986-03-27 | Toshiba Ceramics Co Ltd | Continuous washing device of wafer |
JPH04126578A (en) * | 1990-09-18 | 1992-04-27 | Japan Field Kk | Cleaning method and apparatus for cleaning object using nonaqueous flammable solvent |
EP0490501A3 (en) * | 1990-12-11 | 1992-08-12 | Imperial Chemical Industries Plc | Cleaning of articles |
EP0490501A2 (en) * | 1990-12-11 | 1992-06-17 | Imperial Chemical Industries Plc | Cleaning of articles |
JPH0612468U (en) * | 1992-02-20 | 1994-02-18 | 株式会社精工舎 | Washing / drying device |
JPH062182A (en) * | 1992-04-20 | 1994-01-11 | Mitsubishi Kasei Corp | Oil deposition washing method, washing device and detergent |
JPH0686336U (en) * | 1993-05-21 | 1994-12-13 | 住友精密工業株式会社 | Carrier cleaning equipment |
JPH078870A (en) * | 1993-06-29 | 1995-01-13 | Koi Seisakusho:Kk | Method and device for washing and drying hydrocarbon washing liquid |
JPH07100444A (en) * | 1993-10-06 | 1995-04-18 | Hitachi Zosen Corp | Method and device for cleaning |
JPH06256983A (en) * | 1993-12-16 | 1994-09-13 | Mitsubishi Kasei Corp | Washing device for object stained with oil |
JPH06256984A (en) * | 1993-12-21 | 1994-09-13 | Mitsubishi Kasei Corp | Washing device for object stained with oil |
JPH073481A (en) * | 1993-12-21 | 1995-01-06 | Mitsubishi Chem Corp | Equipment for cleaning greasy parts |
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