JPH04126578A - Cleaning method and apparatus for cleaning object using nonaqueous flammable solvent - Google Patents

Cleaning method and apparatus for cleaning object using nonaqueous flammable solvent

Info

Publication number
JPH04126578A
JPH04126578A JP24775790A JP24775790A JPH04126578A JP H04126578 A JPH04126578 A JP H04126578A JP 24775790 A JP24775790 A JP 24775790A JP 24775790 A JP24775790 A JP 24775790A JP H04126578 A JPH04126578 A JP H04126578A
Authority
JP
Japan
Prior art keywords
cleaned
cleaning
water
flammable solvent
aqueous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24775790A
Other languages
Japanese (ja)
Inventor
Masahide Uchino
正英 内野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Field Co Ltd
Original Assignee
Japan Field Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Field Co Ltd filed Critical Japan Field Co Ltd
Priority to JP24775790A priority Critical patent/JPH04126578A/en
Publication of JPH04126578A publication Critical patent/JPH04126578A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To obtain a safe and reliable cleaning by ejecting water into a mainly cleaned object using nonaqueous flammable solvent and after physically removing the stuck nonaqueous flammable solvent, drying the object to be cleaned. CONSTITUTION:The nonaqueous flammable solvent 3 stuck to the object 7 to be cleaned are physically removed by cleaning of the main cleaning means 1, consisting of ejecting water 11 with high pressure against the object 7 by the water ejecting means 10. Then, removal of the nonaqueous flammable solvent 3 by ejection of water 11 is finished completely and the water 11 stuck to the surface of the object 7 is executes drying with an arbitrary drying means 17. Hence, the drying of the object 7 is to drying water 11 stuck to the washing object and is not to dry up the nonaqueous flammable solvent 3, danger of inflammation and contamination of atmosphere are completely prevented. By this means, safe cleaning operation is attained.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は非水溶系の可燃性溶剤を用いた被洗浄物の洗浄
方法および装置に係るものであって、シルクスクリーン
、機械部品、電子部品、プリント基板、大型部品等の洗
浄作業により、被洗浄物に付着した非水溶系の可燃性溶
剤を安全且つ確実に除去する事を目的とするものである
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method and apparatus for cleaning objects to be cleaned using a non-aqueous flammable solvent, and is applicable to silk screens, mechanical parts, electronic parts, printed materials, etc. The purpose is to safely and reliably remove non-aqueous flammable solvents adhering to objects to be cleaned during cleaning work of substrates, large parts, etc.

従来の技術 従来、シルクスクリーン、機械部品、電子部品、プリン
ト基板、大型部品等の洗浄を行うには、不燃性で引火の
危険がないこと、洗浄力に優れていること等から、一般
的にフロンや塩素系溶剤が用いられていた。しかし、地
球環境の破壊を伴うことから使用が規制されるものとな
った。
Conventional technology Traditionally, for cleaning silk screens, mechanical parts, electronic parts, printed circuit boards, large parts, etc., it has been generally used because it is nonflammable, poses no risk of catching fire, and has excellent cleaning power. Freon and chlorinated solvents were used. However, its use has become regulated because it is associated with destruction of the global environment.

この、フロンや塩素系溶剤を用いた洗浄方法に代わる洗
浄方法としては、水を用いた水系洗浄が考慮される。し
かしながら、水系洗浄は洗浄能力が落ちるため、その分
、洗浄作業を長い時間必要とし、作業効率が悪いものと
なる。また、水系洗浄は、被洗浄物から除去した汚物を
含んだ汚水の処理に適確な方法がなく、フロン系溶剤を
用いた場合とは異なる新たな公害問題を生じる可能性が
ある。
As an alternative cleaning method to this cleaning method using fluorocarbons or chlorinated solvents, aqueous cleaning using water can be considered. However, water-based cleaning has a lower cleaning ability, which requires a longer cleaning time, resulting in poor work efficiency. In addition, water-based cleaning does not have an appropriate method for treating wastewater containing filth removed from objects to be cleaned, and may cause new pollution problems different from those when using fluorocarbon solvents.

また、フロンや塩素系溶剤を用いない非水溶系の溶剤と
しては、洗浄力が優れていることから、オレンジから抽
出した油を主剤とするテルペン溶剤、シリコン系溶剤、
炭化水素系溶剤等の溶剤が考慮される。
In addition, as non-aqueous solvents that do not use fluorocarbons or chlorine-based solvents, terpene solvents whose main ingredient is oil extracted from oranges, silicone-based solvents, etc. have excellent cleaning power.
Solvents such as hydrocarbon solvents are considered.

しかしながらこれらは、いずれも非水溶系の可燃性溶剤
であるから、引火の危険があり、溶剤洗浄後に、被洗浄
物に付着した溶剤を除去するため、加熱したり、蒸気洗
浄を行うことが出来ないものであった。そのため、被洗
浄物に付着した非水溶系の可燃性溶剤を除去するには、
高圧の空気を被洗浄物に吹き付けて、非水溶系の可燃性
溶剤を吹き飛ばすことが行われている。
However, since these are all non-aqueous flammable solvents, there is a risk of ignition, and after solvent cleaning, heating or steam cleaning cannot be performed to remove the solvent adhering to the object being cleaned. It was something that didn't exist. Therefore, in order to remove non-aqueous flammable solvents that have adhered to objects to be cleaned,
BACKGROUND OF THE INVENTION Non-aqueous flammable solvents are blown away by blowing high-pressure air onto the object to be cleaned.

そして、この非水溶系の可燃性溶剤を多く含んだ空気は
、屋外にそのまま排気しているが、溶剤の消費量か多く
不経済であるばかりでなく、大気汚染、引火の危険性等
の点からも好ましくないものである。
Air containing a large amount of non-aqueous flammable solvents is vented outdoors, but this not only consumes a large amount of solvent and is uneconomical, but also poses problems such as air pollution and the risk of ignition. It is also undesirable.

発明が解決しようとする課題 本発明は上述のごとき課題を解決しようとするものであ
って、短時間で被洗浄物の洗浄を完了できるとともに溶
剤の無駄な消費を無くし、環境汚染、引火の危険性等も
除去した、安全て確実な洗浄を可能にしようとするもの
である。
Problems to be Solved by the Invention The present invention attempts to solve the above-mentioned problems.It is possible to complete cleaning of objects to be cleaned in a short time, eliminate wasteful consumption of solvent, and reduce the risk of environmental pollution and ignition. The aim is to enable safe and reliable cleaning that eliminates any harmful substances.

課題を解決するための手段 本発明は上述のごとき課題を解決するため、非水溶系の
可燃性溶剤を用いて主洗浄を行った被洗浄物に水を噴射
し、被洗浄物に付着した非水溶系の可燃性溶剤を物理的
に除去した後、被洗浄物を乾燥手段により乾燥させる事
を特徴として成るものである。
Means for Solving the Problems In order to solve the above-mentioned problems, the present invention sprays water onto the object to be cleaned which has been main-washed using a non-aqueous flammable solvent to remove the non-stick particles attached to the object to be cleaned. This method is characterized in that after physically removing the water-soluble flammable solvent, the object to be cleaned is dried by a drying means.

また、主洗浄は、被洗浄物を非水溶系の可燃性溶剤中に
浸漬して行うものであっても良い。
Further, the main cleaning may be performed by immersing the object to be cleaned in a non-aqueous flammable solvent.

また、主洗浄は、被洗浄物に非水溶系の可燃性溶剤を噴
射して行うものであっても良い。
Further, the main cleaning may be performed by spraying a non-aqueous flammable solvent onto the object to be cleaned.

また、乾燥手段は、水の付着した被洗浄物に加圧空気を
吹き付けることにより、付着した水を吹き飛ばして行う
ものであっても良い。
Further, the drying means may be one that blows off the water that has adhered to the object by blowing pressurized air onto the object to be cleaned.

また、乾燥手段は、水の付着した被洗浄物を加熱雰囲気
に位置し、付着した水を蒸発させて行うものであっても
良い。
Further, the drying means may be one in which the object to be cleaned to which water has adhered is placed in a heating atmosphere and the adhered water is evaporated.

また、上記方法を具体化する装置は、非水溶系の可燃性
溶剤を用いて被洗浄物の主たる洗浄を行う主洗浄手段と
、この主洗浄手段での洗浄により被洗浄物に付着した非
水溶系の可燃性溶剤を物理的に除去し得る圧力水を、被
洗浄物に水ノズルから噴射する水噴射手段と、非水溶系
の可燃性溶剤の除去によって水が付着した被洗浄物を乾
燥させる乾燥手段とから、成るものである。
In addition, the apparatus embodying the above method includes a main cleaning means that primarily cleans the object to be cleaned using a non-aqueous flammable solvent, and a non-aqueous solution that adheres to the object by cleaning with this main cleaning means. A water injection means for injecting pressurized water capable of physically removing flammable solvents from a system from a water nozzle onto an object to be cleaned, and drying an object to be cleaned with water attached by removing the non-aqueous flammable solvent. It consists of a drying means.

また、主洗浄手段は、非水溶系の可燃性溶剤を収納し、
被洗浄物を浸漬し得る主洗浄槽により形成したものであ
っても良い。
In addition, the main cleaning means contains a non-aqueous flammable solvent,
It may be formed by a main cleaning tank in which the objects to be cleaned can be immersed.

また、主洗浄手段は、洗浄槽の内面に、非水溶系の可燃
性溶剤を噴射するための溶剤ノズルを設けて形成したも
のであっても良い。
Further, the main cleaning means may be formed by providing a solvent nozzle for spraying a non-aqueous flammable solvent on the inner surface of the cleaning tank.

また、乾燥手段は、被洗浄物の収納空間の外周に、複数
個のエアーノズルを配置して形成したものであっても良
い。
Further, the drying means may be formed by arranging a plurality of air nozzles around the outer periphery of the storage space for the object to be cleaned.

また、乾燥手段は、被洗浄物に付着した水を乾燥し得る
加熱乾燥雰囲気により形成したものであっても良い。
Further, the drying means may be formed by a heating drying atmosphere capable of drying water adhering to the object to be cleaned.

また、主洗浄手段の溶剤ノズルと、水噴射手段の水ノズ
ルと、乾燥手段のエアーノズルとは同一の槽内に形成し
たものであっても良い。
Further, the solvent nozzle of the main cleaning means, the water nozzle of the water injection means, and the air nozzle of the drying means may be formed in the same tank.

作  用 本発明は上述のごとく構成したものであるから、被洗浄
物の洗浄作業を行うには、非水溶系の可燃性溶剤を用い
て被洗浄物の主たる洗浄を行う。この主たる洗浄は、非
水溶系の可燃性溶剤を収納した主洗浄槽に、被洗浄物を
浸漬して行うものであっても良いし、洗浄槽の内面に、
非水溶系の可燃性溶剤を噴射するための溶剤ノズルを設
けることにより、被洗浄物に非水溶系の可燃性溶剤を噴
射して行うものであっても良い。このように、非水溶系
の可燃性溶剤を被洗浄物に接触させて洗浄作業を行うも
のであるから、水系の洗浄を行う場合に比較して、被洗
浄物の洗浄を著しく早く行うことができ、作業効率を向
上できる。
Function Since the present invention is configured as described above, in order to perform the cleaning work of the object to be cleaned, the main cleaning of the object to be cleaned is performed using a non-aqueous flammable solvent. This main cleaning may be performed by immersing the object to be cleaned in a main cleaning tank containing a non-aqueous flammable solvent, or by immersing the object in the cleaning tank.
A solvent nozzle for spraying the non-aqueous flammable solvent may be provided to spray the non-aqueous flammable solvent onto the object to be cleaned. In this way, since the cleaning work is performed by bringing a non-aqueous flammable solvent into contact with the object to be cleaned, the object to be cleaned can be cleaned much faster than in the case of water-based cleaning. can improve work efficiency.

次に、上記の主洗浄手段での洗浄により被洗浄物に付着
した非水溶系の可燃性溶剤は、被洗浄物に水を噴射して
除去する。この水は、被洗浄物に付着した非水溶系の可
燃性溶剤を物理的に除去し得る圧力により、被洗浄物に
水ノズルから噴射する事により行う。この水の噴射によ
り被洗浄物に付着した非水溶系の可燃性溶剤は、その殆
どが水の物理的圧力により除去される。
Next, the non-aqueous flammable solvent that has adhered to the object to be cleaned due to cleaning by the main cleaning means is removed by spraying water onto the object to be cleaned. This water is sprayed onto the object to be cleaned from a water nozzle at a pressure that can physically remove the non-aqueous flammable solvent adhering to the object. Most of the non-aqueous flammable solvent that adheres to the object to be cleaned due to this jet of water is removed by the physical pressure of the water.

そして、水と混合した非水溶系の可燃性溶剤は水に溶解
することがないから、時間の経過により比重差で水と分
離し、水も非水溶系の可燃性溶剤もそのまま再利用する
ことが可能となり、排水による公害等の問題を生じるこ
とがない。
Since non-aqueous flammable solvents mixed with water do not dissolve in water, they separate from water due to the difference in specific gravity over time, and both water and non-aqueous flammable solvents can be reused as they are. This makes it possible to avoid problems such as pollution caused by wastewater.

次に、この水噴射手段によって非水溶系の可燃性溶剤を
除去した被洗浄物には、水が付着した状態となるが、水
は不燃性で引火の危険性がないから、従来公知の任意の
乾燥手段により、引火の危険がない安全な乾燥を行うこ
とができる。この乾燥手段は、被洗浄物の収納空間の外
周に、複数個のエアーノズルを配置し、高圧エアーを被
洗浄物に噴射し、水を吹き飛ばすことにより行うもので
あっても良いし、被洗浄物に付着した水を乾燥し得る加
熱乾燥雰囲気を形成し、この加熱乾燥雰囲気の中で乾燥
を行うものであっても良い。
Next, water is attached to the object to be cleaned after the non-aqueous flammable solvent has been removed by this water injection means, but since water is nonflammable and poses no risk of ignition, conventionally known This drying method allows safe drying without the risk of ignition. This drying means may be performed by arranging a plurality of air nozzles around the outer periphery of the storage space of the object to be cleaned, and spraying high-pressure air onto the object to be cleaned and blowing off water. A heating drying atmosphere capable of drying water adhering to an object may be formed, and drying may be performed in this heating drying atmosphere.

いずれの乾燥手段を用いる場合であっても、水を乾燥す
るものであるから引火の危険、大気汚染等は生じること
はない。
Regardless of which drying method is used, since it dries water, there is no danger of ignition, air pollution, etc.

実施例 以下本発明の第1実施例を第1図に於いて説明すれば、
(1)は主洗浄手段で、溶剤収納槽(2)内に収納した
非水溶系の可燃性溶剤(3)に、ポンプ(4)およびフ
ィルター(5)を介して、非水溶系の可燃性溶剤(3)
を噴射するための溶剤ノズル(6)を接続するとともに
この溶剤ノズル(6)を、被洗浄物(7)の主たる洗浄
を行う主洗浄槽(8)の内周面に形成している。また、
非水溶系の可燃性溶剤(3)は、テルペン溶剤であって
も良いし、炭化水素系溶剤であっても良いし、シリコン
系溶剤であっても良く、洗浄目的に応じて、任意の非水
溶系の可燃性溶剤(3)を用いることができる。また、
これらの非水溶系の可燃性溶剤(3)を噴射すると空気
との接触面積が大きくなり、引火の危険性も高くなるの
で、主洗浄槽(8)の内部には不燃性である完全フッ素
化液体の蒸気を充満させるとか、完全フッ素化液体を液
状のまま充填すれば、引火の危険性を確実に除去できる
ものとなる。また更には、非水溶系の可燃性溶剤(3)
に水を混合して被洗浄物(7)に噴射することにより、
被洗浄物(7)の洗浄を行うものであっても良い。
Embodiment Below, the first embodiment of the present invention will be explained with reference to FIG.
(1) is the main cleaning means, in which the non-aqueous flammable solvent (3) stored in the solvent storage tank (2) is supplied with a non-aqueous flammable solvent through a pump (4) and a filter (5). Solvent (3)
A solvent nozzle (6) for spraying is connected, and this solvent nozzle (6) is formed on the inner peripheral surface of a main cleaning tank (8) that performs the main cleaning of the object (7) to be cleaned. Also,
The non-aqueous flammable solvent (3) may be a terpene solvent, a hydrocarbon solvent, or a silicone solvent, and may be any non-aqueous solvent depending on the purpose of cleaning. A water-soluble flammable solvent (3) can be used. Also,
Injecting these non-aqueous flammable solvents (3) increases the contact area with the air and increases the risk of ignition, so the inside of the main cleaning tank (8) is completely fluorinated, which is nonflammable. Filling with liquid vapor or filling with fully fluorinated liquid in liquid form ensures that the risk of ignition is eliminated. Furthermore, non-aqueous flammable solvents (3)
By mixing water with water and spraying it on the object to be cleaned (7),
It may also be used to clean the object to be cleaned (7).

次に、上記の主洗浄手段(1)での洗浄により、被洗浄
物(7)に付着した、非水溶系の可燃性溶剤(3)は、
水噴射手段(10)により、被洗浄物(7)に水(11
)を高圧で噴射し物理的に除去する。この水噴射手段(
10)は、水収納槽(12)内に収納した水(11)に
、ポンプ(13)およびフィルター(14)を介して、
水(11)を噴射するための、水ノズル(15)を接続
するとともに、この水ノズル(15)を水噴射槽(16
)の内面に形成している。
Next, the non-aqueous flammable solvent (3) that has adhered to the object to be cleaned (7) by cleaning with the main cleaning means (1) is removed.
The water spraying means (10) sprays water (11) onto the object to be cleaned (7).
) is physically removed by injecting it at high pressure. This water injection means (
10) is supplied to water (11) stored in a water storage tank (12) via a pump (13) and a filter (14).
A water nozzle (15) for spraying water (11) is connected, and this water nozzle (15) is connected to a water spray tank (16).
) is formed on the inner surface.

そして、上記の水(11)の噴射により、水(11)と
混合した非水溶系の可燃性溶剤(3)は、水(11)に
溶解することがないから、時間の経過により比重差で水
(11)と分離し、水(11)も非水溶系の可燃性溶剤
(3)も、そのまま、若しくは水分分離器等を介して再
利用することが可能となり、排水による公害等の問題を
生じることがない。また、水(11)を被洗浄物(7)
に噴射して非水溶系の可燃性溶剤(3)を物理的に除去
するものであるから、高圧の空気を噴射して非水溶系の
可燃性溶剤(3)を除去する従来方法のごとく、非水溶
系の可燃性溶剤(3)を多く含んだ空気を、屋外にその
まま排気したり、溶剤の消費量を多くしたり、大気汚染
、引火の危険性を生じるようなことがない。
As a result of the above injection of water (11), the non-aqueous flammable solvent (3) mixed with water (11) will not dissolve in water (11), so the difference in specific gravity will occur over time. Separated from water (11), both water (11) and non-aqueous flammable solvent (3) can be reused as they are or through a water separator, reducing problems such as pollution caused by wastewater. It never occurs. In addition, water (11) is added to the object to be cleaned (7).
Since this method physically removes the non-aqueous flammable solvent (3) by injecting it into Air containing a large amount of non-aqueous flammable solvent (3) is not exhausted outdoors, the amount of solvent consumed is increased, and there is no risk of air pollution or ignition.

また、水(11)の噴射による非水溶系の可燃性溶剤(
3)の除去を完了し、表面に水(11)が付着した被洗
浄物(7)は、任意の乾燥手段(17)を用いて乾燥を
行うことができる。この、被洗浄物(7)の乾燥は、付
着した水(11)を乾燥するものであって、非水溶系の
可燃性溶剤(3)を乾燥するものではないから、引火の
危険性とか、大気汚染の虞れは全(ない。したがって、
任意の乾燥手段を用いることができるが、被洗浄物(7
)の収納空間(18)を設けた乾燥槽(20)の内周に
、複数個のエアーノズル(21)を配置し、高圧空気に
より水(11)を吹き飛ばして乾燥するものである。ま
た他の乾燥手段(17)は、被洗浄物(7)に付着した
水(11)を乾燥し得る加熱乾燥雰囲気を、熱風、過熱
蒸気等により収納空間(18)に形成したものであって
も良い。
In addition, non-aqueous flammable solvents (
After the removal of step 3), the object to be cleaned (7) with water (11) attached to its surface can be dried using any drying means (17). This drying of the object to be cleaned (7) is to dry the adhering water (11) and not to dry the non-aqueous flammable solvent (3), so there is a risk of ignition. There is no risk of air pollution. Therefore,
Any drying means can be used, but the object to be cleaned (7
) A plurality of air nozzles (21) are arranged around the inner periphery of a drying tank (20) provided with a storage space (18) for drying by blowing off water (11) with high-pressure air. Another drying means (17) is one in which a heated drying atmosphere capable of drying the water (11) adhering to the object to be cleaned (7) is created in the storage space (18) using hot air, superheated steam, etc. Also good.

また、上記実施例では、非水溶系の可燃性溶剤(3)を
用いた主たる洗浄、圧力水を用いた非水溶系の可燃性溶
剤(3)の除去および被洗浄物(7)に付着した水(1
1)の除去を、それぞれ別個の槽で行ったが、必ずしも
その必要はなく、異なる実施例では、第2図に示すごと
(、同一の槽の中で、非水溶系の可燃性溶剤(3)を用
いた主たる洗浄、圧力水を用いた非水溶系の可燃性溶剤
(3)の除去および被洗浄物(7)に付着した水(11
)の除去を、それぞれ行うものである。
In addition, in the above example, the main cleaning was performed using a non-aqueous flammable solvent (3), the removal of the non-aqueous flammable solvent (3) using pressure water, and the removal of the non-aqueous flammable solvent (3) that adhered to the object to be cleaned (7). Water (1
Although the removal of 1) was carried out in separate tanks, this is not necessarily necessary, and in different examples, as shown in FIG. ), removal of non-aqueous flammable solvent (3) using pressure water, and removal of water (11) adhering to the object to be cleaned (7).
), respectively.

即ち、第2図に示す実施例では、主洗浄手段(1)の溶
剤ノズル(6)と、水噴射手段(10)の水ノズル(1
5)と、乾燥手段(1−7)のエアーノズル(21)と
を、本体洗浄槽(22)内に形成している。そして、溶
剤ノズル(6)にはポンプ(13)及びフィルター(1
4)を介して溶剤収納槽(2)を接続し、水ノズル(1
5)には水収納槽(12)を接続し、エアーノズル(2
1)にはブロアー等を接続するのは先の実施例と同一で
ある。しかし、この実施例では機構の簡略化のため、水
ノズル(15)とエアーノズル(21)とを共用し、作
業手順に従って使用する。
That is, in the embodiment shown in FIG. 2, the solvent nozzle (6) of the main cleaning means (1) and the water nozzle (1) of the water injection means (10)
5) and an air nozzle (21) of the drying means (1-7) are formed in the main body cleaning tank (22). The solvent nozzle (6) is equipped with a pump (13) and a filter (1).
Connect the solvent storage tank (2) through the water nozzle (1).
Connect the water storage tank (12) to the air nozzle (2).
Connecting a blower etc. to 1) is the same as in the previous embodiment. However, in this embodiment, in order to simplify the mechanism, the water nozzle (15) and the air nozzle (21) are shared and used according to the work procedure.

そして、被洗浄物(7)には先の実施例と同様の手順に
より、非水溶系の可燃性溶剤(3)、水(11)、圧縮
空気等を順次噴射して接触させることにより洗浄作業を
完了する。この実施例の場合は、洗浄が完全に完了する
まで、被洗浄物(7)を本体洗浄槽(22)から取り出
すことができないため、先の実施例のごと(、複数の槽
を利用するものに比し、洗浄速度は遅くなるが、装置を
小型化し廉価な洗浄作業を可能にする。
Then, the object to be cleaned (7) is cleaned by sequentially injecting and contacting a non-aqueous flammable solvent (3), water (11), compressed air, etc. in the same manner as in the previous example. complete. In this embodiment, the object to be cleaned (7) cannot be taken out from the main body cleaning tank (22) until the cleaning is completely completed. The cleaning speed is slower than that, but the equipment can be made smaller and cleaning can be done at a lower cost.

また、以上の実施例では主洗浄手段(1)を、溶剤ノズ
ル(6)から非水溶系の可燃性溶剤(3)を被洗浄物(
7)に噴射するように構成しているが、主洗浄槽(8)
に、非水溶系の可燃性溶剤(3)を収納し、被洗浄物(
7)を浸漬して洗浄するよう構成したものでも良い。
Further, in the above embodiment, the main cleaning means (1) is configured to spray the non-aqueous flammable solvent (3) from the solvent nozzle (6) onto the object to be cleaned (
7), but the main cleaning tank (8)
A non-aqueous flammable solvent (3) is stored in the container and the object to be cleaned (
7) may be configured to be immersed and cleaned.

また図面中(23)は、主洗浄槽(8)の下底と溶剤収
納槽(2)とを連通ずるドレン管、(24)は、水洗浄
槽(16)の下底と氷収納槽(12)とを連通するドレ
ン管、(25)は、本体洗浄槽(22)の下底を溶剤収
納槽(2)および氷収納槽(12)に、ノくルブ(26
)(27)を介して接続するドレン管である。
In the drawing, (23) is a drain pipe that communicates the bottom of the main cleaning tank (8) with the solvent storage tank (2), and (24) is the drain pipe that connects the bottom of the water cleaning tank (16) with the ice storage tank (2). A drain pipe (25) connects the bottom of the main body cleaning tank (22) to the solvent storage tank (2) and the ice storage tank (12),
) (27).

発明の効果 本発明は上述のごとく構成したものであるから、被洗浄
物は、非水溶系の可燃性溶剤に接触して洗浄作業を行な
い、水系の洗浄を行う場合に比較して、被洗浄物の洗浄
を著しく早(行うことができ、作業効率を向上できる。
Effects of the Invention Since the present invention is configured as described above, the object to be cleaned is cleaned by contacting with a non-aqueous flammable solvent, and the cleaning work is performed by contacting the object with a non-aqueous flammable solvent. You can wash things extremely quickly and improve work efficiency.

また、被洗浄物に付着した非水溶系の可燃性溶剤は、水
の噴射によって、その殆どが水の物理的圧力により除去
され、引火の危険がないとともに水と混合した非水溶系
の可燃性溶剤は、水に溶解することがないから、時間の
経過により比重差で水と分離し、水も非水溶系の可燃性
溶剤もそのまま再利用することが可能となり、排水によ
る公害等の問題を生じることがない。
In addition, most of the non-aqueous flammable solvents adhering to the object to be cleaned are removed by the physical pressure of the water by water injection, and there is no risk of ignition, and non-aqueous flammable solvents mixed with water are removed. Since solvents do not dissolve in water, they separate from water over time due to the difference in specific gravity, making it possible to reuse both water and non-aqueous flammable solvents as they are, eliminating problems such as pollution caused by wastewater. It never occurs.

また、水を被洗浄物に噴射して非水溶系の可燃性溶剤を
物理的に除去するものであるから、高圧の空気を噴射し
て非水溶系の可燃性溶剤を除去する従来方法のごとく、
非水溶系の可燃性溶剤を多く含んだ空気を、屋外にその
まま排気したり、溶剤の消費量を多くしたり、大気汚染
、引火の危険性を生じるようなことがない。
In addition, since water is injected onto the object to be cleaned to physically remove non-aqueous flammable solvents, it is similar to the conventional method of injecting high-pressure air to remove non-aqueous flammable solvents. ,
Air containing a large amount of non-aqueous flammable solvents is not exhausted outdoors, the consumption of solvents is increased, and the risk of air pollution or ignition is not caused.

また被洗浄物の乾燥は、いずれの乾燥手段を用いる場合
であっても、水を乾燥するものであるから引火の危険、
大気汚染等は生じることがなく、安全な洗浄作業を可能
とするものである。
In addition, no matter which drying method is used to dry the item to be cleaned, there is a risk of ignition because it dries water.
This does not cause air pollution or the like and enables safe cleaning work.

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本発明の実施例を示すものであって、第1図は第
1実施例の断面図、第2図は異なる実施例の断面図であ
る。 (1)・・・主洗浄手段 (3)・・・非水溶系の可燃性溶剤 (6)・・・溶剤ノズル (7)・・・・被洗浄物(8
)・・・・主洗浄槽 (10)・・・水噴射手段(11
)・・・・・・・水 (15)・・・・水ノズル(17
)・・・・乾燥手段 (18)・・・・収納空間(21
)・・エアーノズル
The drawings show embodiments of the present invention; FIG. 1 is a sectional view of the first embodiment, and FIG. 2 is a sectional view of a different embodiment. (1) Main cleaning means (3) Non-aqueous flammable solvent (6) Solvent nozzle (7) Object to be cleaned (8
)...Main cleaning tank (10)...Water injection means (11
)...Water (15)...Water nozzle (17
)...Drying means (18)...Storage space (21
)...Air nozzle

Claims (11)

【特許請求の範囲】[Claims] (1)非水溶系の可燃性溶剤を用いて主洗浄を行った被
洗浄物に水を噴射し、被洗浄物に付着した非水溶系の可
燃性溶剤を物理的に除去した後、被洗浄物を乾燥手段に
より乾燥させる事を特徴とする非水溶系の可燃性溶剤を
用いた被洗浄物の洗浄方法。
(1) Water is sprayed onto the object to be cleaned which has been mainly cleaned using a non-aqueous flammable solvent, and after physically removing the non-aqueous flammable solvent that has adhered to the object to be cleaned, A method for cleaning an object using a non-aqueous flammable solvent, characterized in that the object is dried by a drying means.
(2)主洗浄は、被洗浄物を非水溶系の可燃性溶剤中に
浸漬して行うものであることを特徴とする請求項1記載
の非水溶系の可燃性溶剤を用いた被洗浄物の洗浄方法。
(2) The object to be cleaned using a non-aqueous flammable solvent according to claim 1, wherein the main cleaning is performed by immersing the object in a non-aqueous flammable solvent. cleaning method.
(3)主洗浄は、被洗浄物に非水溶系の可燃性溶剤を噴
射して行うものであることを特徴とする請求項1記載の
非水溶系の可燃性溶剤を用いた被洗浄物の洗浄方法。
(3) The main cleaning is carried out by spraying a non-aqueous flammable solvent onto the object to be cleaned using the non-aqueous flammable solvent according to claim 1. Cleaning method.
(4)乾燥手段は、水の付着した被洗浄物に加圧空気を
吹き付けることにより、付着した水を吹き飛ばして行う
ものであることを特徴とする請求項1記載の非水溶系の
可燃性溶剤を用いた被洗浄物の洗浄方法。
(4) The non-aqueous flammable solvent according to claim 1, wherein the drying means blows off the water that has adhered to the object to be cleaned by blowing pressurized air onto the object to be cleaned. A method for cleaning objects to be cleaned using.
(5)乾燥手段は、水の付着した被洗浄物を加熱雰囲気
に位置し、付着した水を蒸発させて行うものであること
を特徴とする請求項1記載の非水溶系の可燃性溶剤を用
いた被洗浄物の洗浄方法。
(5) The non-aqueous flammable solvent according to claim 1, wherein the drying means places the water-attached object to be cleaned in a heating atmosphere and evaporates the attached water. The method used to clean the object to be cleaned.
(6)非水溶系の可燃性溶剤を用いて被洗浄物の主たる
洗浄を行う主洗浄手段と、この主洗浄手段での洗浄によ
り被洗浄物に付着した非水溶系の可燃性溶剤を物理的に
除去し得る圧力水を、被洗浄物に水ノズルから噴射する
水噴射手段と、非水溶系の可燃性溶剤の除去によって水
が付着した被洗浄物を乾燥させる乾燥手段とからなるこ
とを特徴とする非水溶系の可燃性溶剤を用いた被洗浄物
の洗浄装置。
(6) A main cleaning means that primarily cleans the object to be cleaned using a non-aqueous flammable solvent, and a main cleaning means that physically removes the non-aqueous flammable solvent attached to the object by cleaning with this main cleaning means. The cleaning method is characterized by comprising: a water injection means for injecting pressurized water that can be removed by water from a water nozzle onto the object to be cleaned; and a drying means for drying the object to be cleaned to which water has adhered by removing the non-aqueous flammable solvent. A cleaning device for cleaning objects using a non-aqueous flammable solvent.
(7)主洗浄手段は、非水溶系の可燃性溶剤を収納し、
被洗浄物を浸漬し得る主洗浄槽により形成したものであ
る事を特徴とする請求項6記載の非水溶系の可燃性溶剤
を用いた被洗浄物の洗浄装置。
(7) The main cleaning means contains a non-aqueous flammable solvent,
7. The apparatus for cleaning objects using a non-aqueous flammable solvent according to claim 6, characterized in that the apparatus is formed of a main cleaning tank in which the objects to be cleaned can be immersed.
(8)主洗浄手段は、洗浄槽の内面に、非水溶系の可燃
性溶剤を噴射するための溶剤ノズルを設けて形成したも
のである事を特徴とする請求項6記載の非水溶系の可燃
性溶剤を用いた被洗浄物の洗浄装置。
(8) The main cleaning means is formed by providing a solvent nozzle for spraying a non-aqueous flammable solvent on the inner surface of the cleaning tank. Equipment for cleaning objects using flammable solvents.
(9)乾燥手段は、被洗浄物の収納空間の外周に、複数
個のエアーノズルを配置して形成したものである事を特
徴とする請求項6記載の非水溶系の可燃性溶剤を用いた
被洗浄物の洗浄装置。
(9) The drying means is formed by arranging a plurality of air nozzles around the outer periphery of the storage space for the object to be cleaned. Equipment for cleaning items that have been washed.
(10)乾燥手段は、被洗浄物に付着した水を乾燥し得
る加熱乾燥雰囲気により形成したものである事を特徴と
する請求項6記載の非水溶系の可燃性溶剤を用いた被洗
浄物の洗浄装置。
(10) The object to be cleaned using a non-aqueous flammable solvent according to claim 6, wherein the drying means is formed by a heating drying atmosphere capable of drying water adhering to the object to be cleaned. cleaning equipment.
(11)主洗浄手段の溶剤ノズルと、水噴射手段の水ノ
ズルと、乾燥手段のエアーノズルとは同一の槽内に形成
したものであることを特徴とする請求項6、8、9記載
の非水溶系の可燃性溶剤を用いた被洗浄物の洗浄装置。
(11) The solvent nozzle of the main cleaning means, the water nozzle of the water injection means, and the air nozzle of the drying means are formed in the same tank. A device for cleaning objects that uses a non-aqueous flammable solvent.
JP24775790A 1990-09-18 1990-09-18 Cleaning method and apparatus for cleaning object using nonaqueous flammable solvent Pending JPH04126578A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24775790A JPH04126578A (en) 1990-09-18 1990-09-18 Cleaning method and apparatus for cleaning object using nonaqueous flammable solvent

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24775790A JPH04126578A (en) 1990-09-18 1990-09-18 Cleaning method and apparatus for cleaning object using nonaqueous flammable solvent

Publications (1)

Publication Number Publication Date
JPH04126578A true JPH04126578A (en) 1992-04-27

Family

ID=17168213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24775790A Pending JPH04126578A (en) 1990-09-18 1990-09-18 Cleaning method and apparatus for cleaning object using nonaqueous flammable solvent

Country Status (1)

Country Link
JP (1) JPH04126578A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06220491A (en) * 1993-01-27 1994-08-09 Japan Field Kk Storage and regeneration of combustible solvent
JP2012106246A (en) * 2008-01-31 2012-06-07 Yokogawa Denshikiki Co Ltd Substrate washing apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5585026A (en) * 1978-12-22 1980-06-26 Hitachi Ltd Cleaning device
JPS57136909A (en) * 1981-02-18 1982-08-24 Hitachi Ltd Treatment of organic solvent
JPH01111338A (en) * 1987-10-24 1989-04-28 Sony Corp Cleaning and cleaning apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5585026A (en) * 1978-12-22 1980-06-26 Hitachi Ltd Cleaning device
JPS57136909A (en) * 1981-02-18 1982-08-24 Hitachi Ltd Treatment of organic solvent
JPH01111338A (en) * 1987-10-24 1989-04-28 Sony Corp Cleaning and cleaning apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06220491A (en) * 1993-01-27 1994-08-09 Japan Field Kk Storage and regeneration of combustible solvent
JP2012106246A (en) * 2008-01-31 2012-06-07 Yokogawa Denshikiki Co Ltd Substrate washing apparatus

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