JPS5290275A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5290275A JPS5290275A JP676376A JP676376A JPS5290275A JP S5290275 A JPS5290275 A JP S5290275A JP 676376 A JP676376 A JP 676376A JP 676376 A JP676376 A JP 676376A JP S5290275 A JPS5290275 A JP S5290275A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- pattern
- monitor
- occurrence
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Bipolar Transistors (AREA)
Abstract
PURPOSE: To prevent the occurrence of distortion during dicing of elements by additionally providing monitor patterns to a part of each master pattern and performing characteristics testing in the monitor diffusion regions of the wafer produced using this pattern.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP676376A JPS5290275A (en) | 1976-01-23 | 1976-01-23 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP676376A JPS5290275A (en) | 1976-01-23 | 1976-01-23 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5290275A true JPS5290275A (en) | 1977-07-29 |
Family
ID=11647207
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP676376A Pending JPS5290275A (en) | 1976-01-23 | 1976-01-23 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5290275A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54131880A (en) * | 1978-04-03 | 1979-10-13 | Nec Corp | Manufacture of schottky junction element |
JPS60141156U (en) * | 1984-02-28 | 1985-09-18 | 富士電機株式会社 | transistor |
WO2020255944A1 (en) * | 2019-06-17 | 2020-12-24 | ローム株式会社 | SiC SEMICONDUCTOR DEVICE, AND MANUFACTURING METHOD THEREFOR |
-
1976
- 1976-01-23 JP JP676376A patent/JPS5290275A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54131880A (en) * | 1978-04-03 | 1979-10-13 | Nec Corp | Manufacture of schottky junction element |
JPS60141156U (en) * | 1984-02-28 | 1985-09-18 | 富士電機株式会社 | transistor |
WO2020255944A1 (en) * | 2019-06-17 | 2020-12-24 | ローム株式会社 | SiC SEMICONDUCTOR DEVICE, AND MANUFACTURING METHOD THEREFOR |
JPWO2020255944A1 (en) * | 2019-06-17 | 2021-11-25 | ローム株式会社 | SiC semiconductor device and its manufacturing method |
CN113728425A (en) * | 2019-06-17 | 2021-11-30 | 罗姆股份有限公司 | SiC semiconductor device and method for manufacturing same |
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