JPS5290275A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5290275A
JPS5290275A JP676376A JP676376A JPS5290275A JP S5290275 A JPS5290275 A JP S5290275A JP 676376 A JP676376 A JP 676376A JP 676376 A JP676376 A JP 676376A JP S5290275 A JPS5290275 A JP S5290275A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
pattern
monitor
occurrence
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP676376A
Other languages
Japanese (ja)
Inventor
Yoshio Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP676376A priority Critical patent/JPS5290275A/en
Publication of JPS5290275A publication Critical patent/JPS5290275A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Bipolar Transistors (AREA)

Abstract

PURPOSE: To prevent the occurrence of distortion during dicing of elements by additionally providing monitor patterns to a part of each master pattern and performing characteristics testing in the monitor diffusion regions of the wafer produced using this pattern.
COPYRIGHT: (C)1977,JPO&Japio
JP676376A 1976-01-23 1976-01-23 Production of semiconductor device Pending JPS5290275A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP676376A JPS5290275A (en) 1976-01-23 1976-01-23 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP676376A JPS5290275A (en) 1976-01-23 1976-01-23 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5290275A true JPS5290275A (en) 1977-07-29

Family

ID=11647207

Family Applications (1)

Application Number Title Priority Date Filing Date
JP676376A Pending JPS5290275A (en) 1976-01-23 1976-01-23 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5290275A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54131880A (en) * 1978-04-03 1979-10-13 Nec Corp Manufacture of schottky junction element
JPS60141156U (en) * 1984-02-28 1985-09-18 富士電機株式会社 transistor
WO2020255944A1 (en) * 2019-06-17 2020-12-24 ローム株式会社 SiC SEMICONDUCTOR DEVICE, AND MANUFACTURING METHOD THEREFOR

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54131880A (en) * 1978-04-03 1979-10-13 Nec Corp Manufacture of schottky junction element
JPS60141156U (en) * 1984-02-28 1985-09-18 富士電機株式会社 transistor
WO2020255944A1 (en) * 2019-06-17 2020-12-24 ローム株式会社 SiC SEMICONDUCTOR DEVICE, AND MANUFACTURING METHOD THEREFOR
JPWO2020255944A1 (en) * 2019-06-17 2021-11-25 ローム株式会社 SiC semiconductor device and its manufacturing method
CN113728425A (en) * 2019-06-17 2021-11-30 罗姆股份有限公司 SiC semiconductor device and method for manufacturing same

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