JPS5345982A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5345982A
JPS5345982A JP12076876A JP12076876A JPS5345982A JP S5345982 A JPS5345982 A JP S5345982A JP 12076876 A JP12076876 A JP 12076876A JP 12076876 A JP12076876 A JP 12076876A JP S5345982 A JPS5345982 A JP S5345982A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
pattern
diffused
dispersion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12076876A
Other languages
Japanese (ja)
Inventor
Masao Honjo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP12076876A priority Critical patent/JPS5345982A/en
Publication of JPS5345982A publication Critical patent/JPS5345982A/en
Pending legal-status Critical Current

Links

Landscapes

  • Junction Field-Effect Transistors (AREA)

Abstract

PURPOSE: A final pattern is formed first and diffused to eliminate the dispersion of the lap precision of the pattern in each process, thereby manufacturing an element for high frequency.
COPYRIGHT: (C)1978,JPO&Japio
JP12076876A 1976-10-07 1976-10-07 Manufacture of semiconductor device Pending JPS5345982A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12076876A JPS5345982A (en) 1976-10-07 1976-10-07 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12076876A JPS5345982A (en) 1976-10-07 1976-10-07 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5345982A true JPS5345982A (en) 1978-04-25

Family

ID=14794511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12076876A Pending JPS5345982A (en) 1976-10-07 1976-10-07 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5345982A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5669868A (en) * 1979-11-12 1981-06-11 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS6268905A (en) * 1985-09-20 1987-03-30 横河工事株式会社 Running apparatus of winder
CN1082569C (en) * 1996-03-01 2002-04-10 佳能株式会社 Microwave plasma processing apparatus and method therefor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5669868A (en) * 1979-11-12 1981-06-11 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS6268905A (en) * 1985-09-20 1987-03-30 横河工事株式会社 Running apparatus of winder
CN1082569C (en) * 1996-03-01 2002-04-10 佳能株式会社 Microwave plasma processing apparatus and method therefor

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