JPS5345982A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5345982A JPS5345982A JP12076876A JP12076876A JPS5345982A JP S5345982 A JPS5345982 A JP S5345982A JP 12076876 A JP12076876 A JP 12076876A JP 12076876 A JP12076876 A JP 12076876A JP S5345982 A JPS5345982 A JP S5345982A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- pattern
- diffused
- dispersion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Junction Field-Effect Transistors (AREA)
Abstract
PURPOSE: A final pattern is formed first and diffused to eliminate the dispersion of the lap precision of the pattern in each process, thereby manufacturing an element for high frequency.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12076876A JPS5345982A (en) | 1976-10-07 | 1976-10-07 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12076876A JPS5345982A (en) | 1976-10-07 | 1976-10-07 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5345982A true JPS5345982A (en) | 1978-04-25 |
Family
ID=14794511
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12076876A Pending JPS5345982A (en) | 1976-10-07 | 1976-10-07 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5345982A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5669868A (en) * | 1979-11-12 | 1981-06-11 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS6268905A (en) * | 1985-09-20 | 1987-03-30 | 横河工事株式会社 | Running apparatus of winder |
CN1082569C (en) * | 1996-03-01 | 2002-04-10 | 佳能株式会社 | Microwave plasma processing apparatus and method therefor |
-
1976
- 1976-10-07 JP JP12076876A patent/JPS5345982A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5669868A (en) * | 1979-11-12 | 1981-06-11 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS6268905A (en) * | 1985-09-20 | 1987-03-30 | 横河工事株式会社 | Running apparatus of winder |
CN1082569C (en) * | 1996-03-01 | 2002-04-10 | 佳能株式会社 | Microwave plasma processing apparatus and method therefor |
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