JPS53129586A - Semiconductor production unit - Google Patents

Semiconductor production unit

Info

Publication number
JPS53129586A
JPS53129586A JP4431977A JP4431977A JPS53129586A JP S53129586 A JPS53129586 A JP S53129586A JP 4431977 A JP4431977 A JP 4431977A JP 4431977 A JP4431977 A JP 4431977A JP S53129586 A JPS53129586 A JP S53129586A
Authority
JP
Japan
Prior art keywords
production unit
semiconductor production
mask
substrate
sticking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4431977A
Other languages
Japanese (ja)
Inventor
Makoto Nakase
Nobuji Tsuchiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP4431977A priority Critical patent/JPS53129586A/en
Publication of JPS53129586A publication Critical patent/JPS53129586A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To stick a wafer and a mask to each other completely in a short time by a small adsorption force, by sticking the substrate to the mask from the center of the substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP4431977A 1977-04-18 1977-04-18 Semiconductor production unit Pending JPS53129586A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4431977A JPS53129586A (en) 1977-04-18 1977-04-18 Semiconductor production unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4431977A JPS53129586A (en) 1977-04-18 1977-04-18 Semiconductor production unit

Publications (1)

Publication Number Publication Date
JPS53129586A true JPS53129586A (en) 1978-11-11

Family

ID=12688156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4431977A Pending JPS53129586A (en) 1977-04-18 1977-04-18 Semiconductor production unit

Country Status (1)

Country Link
JP (1) JPS53129586A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5335405A (en) * 1991-08-29 1994-08-09 At&T Bell Laboratories Method and apparatus for aligning phototools for photoprocessing of printed circuit boards

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5335405A (en) * 1991-08-29 1994-08-09 At&T Bell Laboratories Method and apparatus for aligning phototools for photoprocessing of printed circuit boards

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