JPS53129586A - Semiconductor production unit - Google Patents
Semiconductor production unitInfo
- Publication number
- JPS53129586A JPS53129586A JP4431977A JP4431977A JPS53129586A JP S53129586 A JPS53129586 A JP S53129586A JP 4431977 A JP4431977 A JP 4431977A JP 4431977 A JP4431977 A JP 4431977A JP S53129586 A JPS53129586 A JP S53129586A
- Authority
- JP
- Japan
- Prior art keywords
- production unit
- semiconductor production
- mask
- substrate
- sticking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: To stick a wafer and a mask to each other completely in a short time by a small adsorption force, by sticking the substrate to the mask from the center of the substrate.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4431977A JPS53129586A (en) | 1977-04-18 | 1977-04-18 | Semiconductor production unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4431977A JPS53129586A (en) | 1977-04-18 | 1977-04-18 | Semiconductor production unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53129586A true JPS53129586A (en) | 1978-11-11 |
Family
ID=12688156
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4431977A Pending JPS53129586A (en) | 1977-04-18 | 1977-04-18 | Semiconductor production unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53129586A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5335405A (en) * | 1991-08-29 | 1994-08-09 | At&T Bell Laboratories | Method and apparatus for aligning phototools for photoprocessing of printed circuit boards |
-
1977
- 1977-04-18 JP JP4431977A patent/JPS53129586A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5335405A (en) * | 1991-08-29 | 1994-08-09 | At&T Bell Laboratories | Method and apparatus for aligning phototools for photoprocessing of printed circuit boards |
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