JPS6447045U - - Google Patents
Info
- Publication number
- JPS6447045U JPS6447045U JP14193187U JP14193187U JPS6447045U JP S6447045 U JPS6447045 U JP S6447045U JP 14193187 U JP14193187 U JP 14193187U JP 14193187 U JP14193187 U JP 14193187U JP S6447045 U JPS6447045 U JP S6447045U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- storage device
- transport
- wafer storage
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 10
- 239000004065 semiconductor Substances 0.000 description 1
Description
第１図は本考案の一実施例の側面図、第２図は
一実施例による搬出動作のフローチヤートである
。第３図は本考案の一従来例の側面図である。
なお図面に用いた符号において、１１…ウエハ
収納器、１２…半導体ウエハ、１４…上下駆動ネ
ジ、１６…搬送ベルト、１７…ウエハ検出センサ
、である。
FIG. 1 is a side view of an embodiment of the present invention, and FIG. 2 is a flowchart of an unloading operation according to the embodiment. FIG. 3 is a side view of a conventional example of the present invention. In addition, in the reference numerals used in the drawings, 11...wafer storage device, 12...semiconductor wafer, 14...vertical drive screw, 16...transport belt, 17...wafer detection sensor.
Claims (1)
て且つ上下方向へ並べた状態で収納するウエハ収
納器と、 このウエハ収納器に対して前記ウエハを出し入
れするウエハ搬送手段と、 前記ウエハ収納器と前記ウエハ搬送手段とを上
下方向へ相対的に移動させる移動手段と、 前記ウエハ搬送手段による前記ウエハの搬送の
有無を検出する搬送検出手段と、 この搬送検出手段の検出情報に基いて前記移動
手段による移動量を補正する移動量補正手段とを
夫々具備するウエハ搬送装置。[Claims for Utility Model Registration] A wafer storage device for storing a plurality of wafers with their main surfaces parallel to each other and arranged vertically; and a wafer storage device for loading and unloading the wafers into the wafer storage device. a transport means; a moving means for vertically moving the wafer storage device and the wafer transport means; a transport detection means for detecting whether or not the wafer is being transported by the wafer transport means; and a movement amount correction means for correcting the movement amount by the movement means based on the detection information of the wafer transfer apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14193187U JPS6447045U (en) | 1987-09-17 | 1987-09-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14193187U JPS6447045U (en) | 1987-09-17 | 1987-09-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6447045U true JPS6447045U (en) | 1989-03-23 |
Family
ID=31407436
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14193187U Pending JPS6447045U (en) | 1987-09-17 | 1987-09-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6447045U (en) |
-
1987
- 1987-09-17 JP JP14193187U patent/JPS6447045U/ja active Pending
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