JPS59176823U - Conveyance device - Google Patents
Conveyance deviceInfo
- Publication number
- JPS59176823U JPS59176823U JP7261083U JP7261083U JPS59176823U JP S59176823 U JPS59176823 U JP S59176823U JP 7261083 U JP7261083 U JP 7261083U JP 7261083 U JP7261083 U JP 7261083U JP S59176823 U JPS59176823 U JP S59176823U
- Authority
- JP
- Japan
- Prior art keywords
- conveyance device
- sample
- transports
- carrier
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Attitude Control For Articles On Conveyors (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は半導体ウェハを収容したウェハキャリアの一例
を示す斜視図、第２図はウェハキャリアを搬送用ベルト
に載置して搬送する従来例を示す平面図、第３図は搬送
時における半導体ウェハの変位を説明するための図、第
４図は本考案の一実施例である搬送用ベルト上に載置し
たウェハキャリヤを示す平面図、第５図はキャリア内に
収容した半導体ウェハを示す側面図である。
図吊、１．１１・・・ウェハキャリア、２．１２・・・
半導体ウェハ、３・・・Ｕ溝、４・・・底板、５．６・
・・側板、７．１３・・・搬送用ベルト。Fig. 1 is a perspective view showing an example of a wafer carrier containing semiconductor wafers, Fig. 2 is a plan view showing a conventional example in which a wafer carrier is placed on a transport belt and transported, and Fig. 3 shows semiconductors during transport. A diagram for explaining the displacement of a wafer, FIG. 4 is a plan view showing a wafer carrier placed on a conveyor belt, which is an embodiment of the present invention, and FIG. 5 shows a semiconductor wafer housed in the carrier. FIG. Figure hanging, 1.11... Wafer carrier, 2.12...
Semiconductor wafer, 3... U groove, 4... Bottom plate, 5.6.
...Side plate, 7.13...Transportation belt.
Claims (1)
に、該試料の主面が平行となるようにして搬送すること
を特徴とする搬送装置。A transport device that transports a sample accommodated in a carrier so that the main surface of the sample is parallel to the traveling direction of a transport system that transports the sample.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7261083U JPS59176823U (en) | 1983-05-16 | 1983-05-16 | Conveyance device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7261083U JPS59176823U (en) | 1983-05-16 | 1983-05-16 | Conveyance device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59176823U true JPS59176823U (en) | 1984-11-26 |
Family
ID=30202745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7261083U Pending JPS59176823U (en) | 1983-05-16 | 1983-05-16 | Conveyance device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59176823U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55143026A (en) * | 1979-04-24 | 1980-11-08 | Mitsubishi Electric Corp | Device for transferring thin plate |
-
1983
- 1983-05-16 JP JP7261083U patent/JPS59176823U/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55143026A (en) * | 1979-04-24 | 1980-11-08 | Mitsubishi Electric Corp | Device for transferring thin plate |
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