JPS5844850U - Dust-free conveyor - Google Patents
Dust-free conveyorInfo
- Publication number
- JPS5844850U JPS5844850U JP14066581U JP14066581U JPS5844850U JP S5844850 U JPS5844850 U JP S5844850U JP 14066581 U JP14066581 U JP 14066581U JP 14066581 U JP14066581 U JP 14066581U JP S5844850 U JPS5844850 U JP S5844850U
- Authority
- JP
- Japan
- Prior art keywords
- dust
- loading section
- free conveyor
- feeding
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の搬送装置によって搬送される被搬送状
の一例であるキャリヤに積載された半導体ウェーハを示
す斜視図、第２図及び第３図は、夫々従来の搬送装置を
示す側面図であって、第２図はベルトコンベア式のもの
、第３図は送り機構にスクリュウとナツトの噛合を用い
たものである。
第４図は本考案の搬送装置の一実施例を示す側断面図で
ある。
１・・・・・・キャリヤ、２・・・・・・半導体ウェー
ハ、３・・・・・・スクリュウ、４・・・・・・載置部
、５・・・・・・ナツト、１３・・・・・・移動ブロッ
ク、１４・・・・・・支持体、１５・・・・・・ガ′イ
ドバー、１７・・・・・・送り機構、１８・・・・・・
液（水）、１９・・・・・・タンク、２０・・・・・・
排出孔、２１・・・・・・供給孔、Ｃ・・・・・・無塵
搬送装置。FIG. 1 is a perspective view showing semiconductor wafers loaded on a carrier, which is an example of a conveyed state to be transported by the transport device of the present invention, and FIGS. 2 and 3 are side views showing conventional transport devices, respectively. FIG. 2 shows a belt conveyor type feed mechanism, and FIG. 3 shows a feed mechanism using a screw and nut engagement. FIG. 4 is a side sectional view showing one embodiment of the conveying device of the present invention. DESCRIPTION OF SYMBOLS 1...Carrier, 2...Semiconductor wafer, 3...Screw, 4...Placement part, 5...Nut, 13. ...Moving block, 14... Support body, 15... Guide bar, 17... Feeding mechanism, 18...
Liquid (water), 19...Tank, 20...
Discharge hole, 21... Supply hole, C... Dust-free conveyance device.
Claims (1)
を所定位置間に移動させる送り機構とを有□ する搬
送装置において、載置部のみが液面上に突出する状態で
、送り機構を液中に浸漬したことを゛ 特徴とする無塵
搬送装置。In a transport device that has a loading section on which an article such as a semiconductor wafer is placed, and a feeding mechanism that moves the loading section between predetermined positions, the feeding is carried out with only the loading section protruding above the liquid surface. A dust-free conveyance device characterized by having a mechanism immersed in liquid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14066581U JPS5844850U (en) | 1981-09-21 | 1981-09-21 | Dust-free conveyor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14066581U JPS5844850U (en) | 1981-09-21 | 1981-09-21 | Dust-free conveyor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5844850U true JPS5844850U (en) | 1983-03-25 |
Family
ID=29933815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14066581U Pending JPS5844850U (en) | 1981-09-21 | 1981-09-21 | Dust-free conveyor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5844850U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0361330U (en) * | 1989-10-17 | 1991-06-17 | ||
| CN110047777A (en) * | 2018-01-17 | 2019-07-23 | 株式会社迪思科 | The transport mechanism of cutting apparatus |
-
1981
- 1981-09-21 JP JP14066581U patent/JPS5844850U/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0361330U (en) * | 1989-10-17 | 1991-06-17 | ||
| CN110047777A (en) * | 2018-01-17 | 2019-07-23 | 株式会社迪思科 | The transport mechanism of cutting apparatus |
| JP2019123049A (en) * | 2018-01-17 | 2019-07-25 | 株式会社ディスコ | Transport mechanism of cutting device |
| CN110047777B (en) * | 2018-01-17 | 2024-02-20 | 株式会社迪思科 | Conveying mechanism of cutting device |
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