JPH0180933U - - Google Patents
Info
- Publication number
- JPH0180933U JPH0180933U JP1987177941U JP17794187U JPH0180933U JP H0180933 U JPH0180933 U JP H0180933U JP 1987177941 U JP1987177941 U JP 1987177941U JP 17794187 U JP17794187 U JP 17794187U JP H0180933 U JPH0180933 U JP H0180933U
- Authority
- JP
- Japan
- Prior art keywords
- loading
- wafers
- elevator mechanism
- transfer device
- wafer transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 3
Landscapes
- Warehouses Or Storage Devices (AREA)
Description
第１図、第２図はこの考案の一実施例によるウ
エハ搬送装置を示す平面図及び要部断面図、第３
図、第４図は従来のウエハ搬送装置を示す平面図
及び要部断面図である。
図中、１はウエハ、２，３はカセツト、４は搬
送ベルト機構、１７はエレベータ機構、１８はア
クチユエータ、１９はカセツト受け台である。尚
、図中同一符号は同一又は相当部分を示す。
1 and 2 are a plan view and a cross-sectional view of essential parts of a wafer transfer device according to an embodiment of this invention, and FIG.
4 are a plan view and a sectional view of a main part of a conventional wafer transfer device. In the figure, 1 is a wafer, 2 and 3 are cassettes, 4 is a conveyor belt mechanism, 17 is an elevator mechanism, 18 is an actuator, and 19 is a cassette holder. Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
れ複数のカセツトを搭載できるカセツト受け台を
有するエレベータ機構を備え、かつこのエレベー
タ機構を直進位置決めするアクチユエータを設け
、所望するカセツトを選択してウエハを回収、供
給可能に構成したことを特徴とするウエハ搬送装
置。 It is equipped with an elevator mechanism having a cassette holder placed opposite to a carry-out mechanism for loading and unloading wafers and capable of loading a plurality of cassettes, and an actuator for linearly positioning the elevator mechanism, so that a desired cassette can be selected and the wafers can be loaded. A wafer transfer device characterized by being configured to be able to be collected and supplied.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987177941U JPH0180933U (en) | 1987-11-20 | 1987-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987177941U JPH0180933U (en) | 1987-11-20 | 1987-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0180933U true JPH0180933U (en) | 1989-05-30 |
Family
ID=31469586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987177941U Pending JPH0180933U (en) | 1987-11-20 | 1987-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0180933U (en) |
-
1987
- 1987-11-20 JP JP1987177941U patent/JPH0180933U/ja active Pending
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