JPS62163951U - - Google Patents
Info
- Publication number
- JPS62163951U JPS62163951U JP5338886U JP5338886U JPS62163951U JP S62163951 U JPS62163951 U JP S62163951U JP 5338886 U JP5338886 U JP 5338886U JP 5338886 U JP5338886 U JP 5338886U JP S62163951 U JPS62163951 U JP S62163951U
- Authority
- JP
- Japan
- Prior art keywords
- vehicle
- smif pod
- smif
- semiconductor manufacturing
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 11
- 101000873785 Homo sapiens mRNA-decapping enzyme 1A Proteins 0.000 claims description 9
- 102100035856 mRNA-decapping enzyme 1A Human genes 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
- Packaging Frangible Articles (AREA)
- Warehouses Or Storage Devices (AREA)
Description
第１図はこの考案の一実施例である半導体製造
装置への半導体ウエハ用カセツト装填機構を示す
要部のみを示した断面図、第２図は同実施例で使
用されビークル及びＳＭＩＦポツドを示す正断面
図、第３図は同ビークルを示す斜視図、第４図は
この考案の一実施例であるカセツト装填機構の作
用を説明する図、第５図は第４図と同様の図、第
６図はこの考案の一実施例で使用された半導体ウ
エハ自動移送システムの概要を示す平面図、第７
図は同要部のみを示す斜視図、第８図はＳＭＩＦ
システムが適用されたクリーンルームを示す斜視
図、第９図はこの考案の実施例に用いられるＳＭ
ＩＦポツドを示す断面図である。
１……半導体製造装置、４……ＳＭＩＦアーム
、６……半導体ウエハ用カセツト、８……ＳＭＩ
Ｆポツド、９……ケース本体、１０……底板、１
１……ビークル、１６……支持手段、２２……脱
着手段。
Fig. 1 is a sectional view showing only the main parts of a mechanism for loading semiconductor wafer cassettes into semiconductor manufacturing equipment, which is an embodiment of this invention, and Fig. 2 shows a vehicle and an SMIF pod used in the same embodiment. 3 is a perspective view showing the same vehicle, FIG. 4 is a diagram illustrating the operation of the cassette loading mechanism which is an embodiment of this invention, FIG. 5 is a view similar to FIG. 4, and FIG. Figure 6 is a plan view showing an overview of the semiconductor wafer automatic transfer system used in one embodiment of this invention;
The figure is a perspective view showing only the main parts, and Figure 8 is the SMIF
A perspective view showing a clean room to which the system is applied, FIG. 9 is an SM used in an embodiment of this invention.
FIG. 3 is a sectional view showing the IF pot. 1... Semiconductor manufacturing equipment, 4... SMIF arm, 6... Semiconductor wafer cassette, 8... SMI
F pot, 9...Case body, 10...Bottom plate, 1
1... Vehicle, 16... Support means, 22... Detachment means.
Claims (1)
され、前記底板上に半導体ウエハ用カセツトが収
納されたＳＭＩＦポツドと、このＳＭＩＦポツド
を内部に着脱自在に収納した状態で半導体製造装
置間を移動するビークルと、該ビークル及び前記
半導体製造装置の間での半導体ウエハ用カセツト
の受け渡しを行うＳＭＩＦアームとを備え、かつ
前記ビークルには、前記ＳＭＩＦポツドを着脱自
在に支持する支持手段が設けられ、さらに前記Ｓ
ＭＩＦアームには、前記ビークルが載置される装
着部と、このビークルの載置、取り外しに従つて
ビークルからのＳＭＩＦポツドの脱着を行う脱着
手段とが設けられていることを特徴とする半導体
製造装置への半導体ウエハ用カセツト装填機構。 The SMIF pod consists of a box-shaped case body and a removable bottom plate, and a cassette for semiconductor wafers is stored on the bottom plate, and the SMIF pod is moved between semiconductor manufacturing equipment with the SMIF pod removably stored inside. comprising a vehicle and an SMIF arm for transferring semiconductor wafer cassettes between the vehicle and the semiconductor manufacturing equipment, and the vehicle is provided with support means for removably supporting the SMIF pod, and further Said S
Semiconductor manufacturing characterized in that the MIF arm is provided with a mounting section on which the vehicle is placed, and a detaching means for attaching and detaching the SMIF pod from the vehicle in accordance with the placement and removal of the vehicle. A cassette loading mechanism for semiconductor wafers into the equipment.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5338886U JPH0249722Y2 (en) | 1986-04-09 | 1986-04-09 | |
| US07/018,993 US4826360A (en) | 1986-03-10 | 1987-02-25 | Transfer system in a clean room |
| EP87301888A EP0239266A3 (en) | 1986-03-10 | 1987-03-04 | Transfer system in a clean room |
| CA000531391A CA1271271A (en) | 1986-03-10 | 1987-03-06 | Semiconductor wafer transport system in a clean room |
| KR870002102A KR870009446A (en) | 1986-03-10 | 1987-03-09 | Transport system in clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5338886U JPH0249722Y2 (en) | 1986-04-09 | 1986-04-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62163951U true JPS62163951U (en) | 1987-10-17 |
| JPH0249722Y2 JPH0249722Y2 (en) | 1990-12-27 |
Family
ID=30879406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5338886U Expired JPH0249722Y2 (en) | 1986-03-10 | 1986-04-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249722Y2 (en) |
-
1986
- 1986-04-09 JP JP5338886U patent/JPH0249722Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0249722Y2 (en) | 1990-12-27 |
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