JPS5845360U - Substrate attachment/detachment device - Google Patents

Substrate attachment/detachment device

Info

Publication number
JPS5845360U
JPS5845360U JP13901681U JP13901681U JPS5845360U JP S5845360 U JPS5845360 U JP S5845360U JP 13901681 U JP13901681 U JP 13901681U JP 13901681 U JP13901681 U JP 13901681U JP S5845360 U JPS5845360 U JP S5845360U
Authority
JP
Japan
Prior art keywords
substrate
detachment device
substrate attachment
main body
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13901681U
Other languages
Japanese (ja)
Other versions
JPS5917894Y2 (en
Inventor
土谷　高陽
竹下　治
Original Assignee
日本真空技術株式会社
大日本スクリ−ン製造株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社, 大日本スクリ−ン製造株式会社 filed Critical 日本真空技術株式会社
Priority to JP13901681U priority Critical patent/JPS5917894Y2/en
Publication of JPS5845360U publication Critical patent/JPS5845360U/en
Application granted granted Critical
Publication of JPS5917894Y2 publication Critical patent/JPS5917894Y2/en
Expired legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本案装置の１例の一部を截除した側面図、第２
図はその要部の斜面図である。 １・・・サブストレートホルダ、２・・・受座、３・・
・サブストレート、４・・・装置本体、５・・・真空チ
ャック、６・・・搬送アーム。Figure 1 is a partially cutaway side view of one example of the proposed device;
The figure is a perspective view of the main part. 1...Substrate holder, 2...Catch, 3...
・Substrate, 4... Device main body, 5... Vacuum chuck, 6... Transfer arm.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ドーム状その他のサブストレートホルダ１に受座２を円
周上の複数個に備え、これにシリコンウェハその他のサ
ブストレート３をその側方の装置本体４からのびる先端
に真空チャック５を有する搬送アーム６で搬送して着脱
するようにした式のものにおいて、該装置本体４に該受
座２近傍の該ホルダ１の周縁部１ａに対向する上側と下
側との′　ガイドローラ７．８を各作動シリンダその他
の駆動源９，１０により互に開閉自在に設けて成るサブ
ストレートの着脱装置。A dome-shaped or other substrate holder 1 is equipped with a plurality of seats 2 on the circumference, and a silicon wafer or other substrate 3 is placed on the substrate holder 1, and a transfer arm having a vacuum chuck 5 at the tip extending from an apparatus main body 4 on the side thereof. In the device body 4, upper and lower guide rollers 7 and 8 facing the peripheral edge 1a of the holder 1 in the vicinity of the catch 2 are installed on the main body 4 of the device. A substrate attachment/detachment device which is provided so as to be mutually openable and closable by operating cylinders and other drive sources 9 and 10.
JP13901681U 1981-09-21 1981-09-21 Substrate attachment/detachment device Expired JPS5917894Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13901681U JPS5917894Y2 (en) 1981-09-21 1981-09-21 Substrate attachment/detachment device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13901681U JPS5917894Y2 (en) 1981-09-21 1981-09-21 Substrate attachment/detachment device

Publications (2)

Publication Number Publication Date
JPS5845360U true JPS5845360U (en) 1983-03-26
JPS5917894Y2 JPS5917894Y2 (en) 1984-05-24

Family

ID=29932219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13901681U Expired JPS5917894Y2 (en) 1981-09-21 1981-09-21 Substrate attachment/detachment device

Country Status (1)

Country Link
JP (1) JPS5917894Y2 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8872517B2 (en) 1996-07-29 2014-10-28 Midtronics, Inc. Electronic battery tester with battery age input
US8958998B2 (en) 1997-11-03 2015-02-17 Midtronics, Inc. Electronic battery tester with network communication
US7446536B2 (en) 2000-03-27 2008-11-04 Midtronics, Inc. Scan tool for electronic battery tester
US8513949B2 (en) 2000-03-27 2013-08-20 Midtronics, Inc. Electronic battery tester or charger with databus connection
US9255955B2 (en) 2003-09-05 2016-02-09 Midtronics, Inc. Method and apparatus for measuring a parameter of a vehicle electrical system
US9018958B2 (en) 2003-09-05 2015-04-28 Midtronics, Inc. Method and apparatus for measuring a parameter of a vehicle electrical system
US9496720B2 (en) 2004-08-20 2016-11-15 Midtronics, Inc. System for automatically gathering battery information
US8344685B2 (en) 2004-08-20 2013-01-01 Midtronics, Inc. System for automatically gathering battery information
GB2463829B (en) 2007-07-17 2012-11-21 Midtronics Inc Battery tester for electric vehicle
US9274157B2 (en) 2007-07-17 2016-03-01 Midtronics, Inc. Battery tester for electric vehicle
US9588185B2 (en) 2010-02-25 2017-03-07 Keith S. Champlin Method and apparatus for detecting cell deterioration in an electrochemical cell or battery
CN102804478B (en) 2010-03-03 2015-12-16 密特电子公司 For the watch-dog of front terminals battery
US9419311B2 (en) 2010-06-18 2016-08-16 Midtronics, Inc. Battery maintenance device with thermal buffer
US9244100B2 (en) 2013-03-15 2016-01-26 Midtronics, Inc. Current clamp with jaw closure detection
US9312575B2 (en) 2013-05-16 2016-04-12 Midtronics, Inc. Battery testing system and method
US11566972B2 (en) 2019-07-31 2023-01-31 Midtronics, Inc. Tire tread gauge using visual indicator

Also Published As

Publication number Publication date
JPS5917894Y2 (en) 1984-05-24

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