JPS63134543U - - Google Patents
Info
- Publication number
- JPS63134543U JPS63134543U JP2575487U JP2575487U JPS63134543U JP S63134543 U JPS63134543 U JP S63134543U JP 2575487 U JP2575487 U JP 2575487U JP 2575487 U JP2575487 U JP 2575487U JP S63134543 U JPS63134543 U JP S63134543U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transport device
- sheet
- frame
- transports
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000032258 transport Effects 0.000 claims 3
Description
第１図は本案実施例に係るウエハ搬送装置の平
面図、第２図は第１図のＸ―Ｘ線断面概要図、第
３図は従来の搬送装置の例示図である。
１……ウエハ、２……シート、３……フレーム
、４……搬送装置、５……板。
FIG. 1 is a plan view of a wafer transfer device according to an embodiment of the present invention, FIG. 2 is a schematic cross-sectional view taken along the line X--X in FIG. 1, and FIG. 3 is an illustrative view of a conventional transfer device. 1... Wafer, 2... Sheet, 3... Frame, 4... Transfer device, 5... Board.
Claims (1)
レームを上方から保持して搬送する搬送装置の下
面に、ウエハの外形形状より大径とした板を設け
てなくウエハ搬送装置。 A wafer transport device that does not have a plate with a diameter larger than the outer shape of the wafer on the underside of the transport device, which transports a wafer attached to a sheet while holding the periphery of the wafer from above using a frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2575487U JPS63134543U (en) | 1987-02-24 | 1987-02-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2575487U JPS63134543U (en) | 1987-02-24 | 1987-02-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63134543U true JPS63134543U (en) | 1988-09-02 |
Family
ID=30826201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2575487U Pending JPS63134543U (en) | 1987-02-24 | 1987-02-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63134543U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59935A (en) * | 1982-06-25 | 1984-01-06 | Toshiba Corp | Conveying device for cassette ring |
-
1987
- 1987-02-24 JP JP2575487U patent/JPS63134543U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59935A (en) * | 1982-06-25 | 1984-01-06 | Toshiba Corp | Conveying device for cassette ring |