JPH0229520U - - Google Patents
Info
- Publication number
- JPH0229520U JPH0229520U JP10851788U JP10851788U JPH0229520U JP H0229520 U JPH0229520 U JP H0229520U JP 10851788 U JP10851788 U JP 10851788U JP 10851788 U JP10851788 U JP 10851788U JP H0229520 U JPH0229520 U JP H0229520U
- Authority
- JP
- Japan
- Prior art keywords
- hot plate
- wafer
- oven
- plate oven
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は本考案のホツトプレートオーブンの一
実施例でホツトプレート上にウエーハを載置した
断面図、第２図と第３図は従来のホツトプレート
オーブンのホツトプレート上にウエーハを載置し
た断面図である。
１…ウエーハ、２ａ，２ｂ…搬送用レール、３
…ホツトプレート、５…バキユーム穴、７ａ〜７
ｎ…溝。
Figure 1 is a cross-sectional view of an embodiment of the hot plate oven of the present invention, with a wafer placed on the hot plate, and Figures 2 and 3 are cross-sectional views of a conventional hot plate oven with a wafer placed on the hot plate. FIG. 1... Wafer, 2a, 2b... Transport rail, 3
...Hot plate, 5...Vacuum hole, 7a-7
n...Groove.
Claims (1)
置まで搬送用レールで搬送し、ホツトプレートに
形成されたバキユーム穴でウエーハを吸引し、ウ
エーハをホツトプレートに密着固定し、所定の処
理を行うホツトプレートオーブンにおいて、前記
ホツトプレートの表面に、ウエーハとの接触面積
減少用の溝を形成したことを特徴とするホツトプ
レートオーブン。 In the hot plate oven, the wafer is transported to a predetermined position in the hot plate oven using a transport rail, the wafer is sucked through a vacuum hole formed in the hot plate, the wafer is closely fixed to the hot plate, and a predetermined process is performed. A hot plate oven characterized in that a groove for reducing a contact area with a wafer is formed on the surface of the hot plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10851788U JPH0229520U (en) | 1988-08-17 | 1988-08-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10851788U JPH0229520U (en) | 1988-08-17 | 1988-08-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0229520U true JPH0229520U (en) | 1990-02-26 |
Family
ID=31343927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10851788U Pending JPH0229520U (en) | 1988-08-17 | 1988-08-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0229520U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03128221U (en) * | 1990-03-30 | 1991-12-24 |
-
1988
- 1988-08-17 JP JP10851788U patent/JPH0229520U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03128221U (en) * | 1990-03-30 | 1991-12-24 |