JPS63147820U - - Google Patents
Info
- Publication number
- JPS63147820U JPS63147820U JP3848687U JP3848687U JPS63147820U JP S63147820 U JPS63147820 U JP S63147820U JP 3848687 U JP3848687 U JP 3848687U JP 3848687 U JP3848687 U JP 3848687U JP S63147820 U JPS63147820 U JP S63147820U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- fork
- transports
- placing
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000032258 transport Effects 0.000 claims 2
- 238000007664 blowing Methods 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Description
第１図は本考案の一実施例であるウエハ搬送装
置の側面図、第２図は第１図の平面図、第３図は
第１図のフオーク部の斜視図である。
２……フオーク、４……アーム、５……ガス吹
出し孔、６，７……エアーシリンダ。
1 is a side view of a wafer transfer device which is an embodiment of the present invention, FIG. 2 is a plan view of FIG. 1, and FIG. 3 is a perspective view of the fork portion of FIG. 1. 2...Fork, 4...Arm, 5...Gas outlet, 6, 7...Air cylinder.
Claims (1)
送装置において、フオークのウエハ載置面より上
方にガス吹出し孔を設けたことを特徴とするウエ
ハ搬送。 A wafer transport device that transports a wafer by placing it on a fork, characterized in that a gas blowing hole is provided above the wafer mounting surface of the fork.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3848687U JPS63147820U (en) | 1987-03-18 | 1987-03-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3848687U JPS63147820U (en) | 1987-03-18 | 1987-03-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63147820U true JPS63147820U (en) | 1988-09-29 |
Family
ID=30850780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3848687U Pending JPS63147820U (en) | 1987-03-18 | 1987-03-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63147820U (en) |
-
1987
- 1987-03-18 JP JP3848687U patent/JPS63147820U/ja active Pending