JPH045645U - - Google Patents
Info
- Publication number
- JPH045645U JPH045645U JP4620290U JP4620290U JPH045645U JP H045645 U JPH045645 U JP H045645U JP 4620290 U JP4620290 U JP 4620290U JP 4620290 U JP4620290 U JP 4620290U JP H045645 U JPH045645 U JP H045645U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- handler
- sucking
- semiconductor
- figures
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 2
- 210000000078 claw Anatomy 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案に係る半導体デバイス用ハンド
ラの要部正面図、第２図は第１図のＡ−Ａ線に沿
う側面図、第３図は第１図のＢ−Ｂ線に沿う側面
図、第４図ａ，ｂ，ｃ，ｄは第１図乃至第３図に
示した同上ハンドラの動作状態図、第５図は第４
図のｄＣ−Ｃ線に沿う側面図である。
１……シリンダ、２……ロツド、３……取付ベ
ース、５……外側ロツド、６……内側ロツド、１
１……吸着面、１５……アライメントアーム、２
１……位置合わせ爪、３０……半導体デバイス。
FIG. 1 is a front view of essential parts of a semiconductor device handler according to the present invention, FIG. 2 is a side view taken along line A-A in FIG. 1, and FIG. 3 is a side view taken along line B-B in FIG. Figures 4a, b, c, and d are operation state diagrams of the same handler shown in Figures 1 to 3, and Figure 5 is a diagram of the operation state of the handler shown in Figures 1 to 3.
It is a side view along the dC-C line of a figure. 1...Cylinder, 2...Rod, 3...Mounting base, 5...Outer rod, 6...Inner rod, 1
1...Adsorption surface, 15...Alignment arm, 2
1... Positioning claw, 30... Semiconductor device.
Claims (1)
体デバイス用ハンドラにおいて、 前記半導体デバイスを吸着するチヤツク部に前
記半導体デバイスの位置合わせを行う位置合わせ
機構を設けたことを特徴とする半導体デバイス用
ハンドラ。[Claims for Utility Model Registration] A semiconductor device handler for sucking and transporting a semiconductor device, characterized in that a chuck portion for sucking the semiconductor device is provided with an alignment mechanism for aligning the semiconductor device. Handler for semiconductor devices.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4620290U JPH045645U (en) | 1990-04-28 | 1990-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4620290U JPH045645U (en) | 1990-04-28 | 1990-04-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH045645U true JPH045645U (en) | 1992-01-20 |
Family
ID=31561076
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4620290U Pending JPH045645U (en) | 1990-04-28 | 1990-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH045645U (en) |
-
1990
- 1990-04-28 JP JP4620290U patent/JPH045645U/ja active Pending