JPH0186230U - - Google Patents
Info
- Publication number
- JPH0186230U JPH0186230U JP18140587U JP18140587U JPH0186230U JP H0186230 U JPH0186230 U JP H0186230U JP 18140587 U JP18140587 U JP 18140587U JP 18140587 U JP18140587 U JP 18140587U JP H0186230 U JPH0186230 U JP H0186230U
- Authority
- JP
- Japan
- Prior art keywords
- wafer boat
- tube
- cantilever tube
- cantilever
- support arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 1
Description
第１図はこの考案のウエハ搬送装置の実施例を
示す斜視図、第２図は第１図に示したウエハ搬送
装置における支持アームの移動を示す図、第３図
は第１図に示したウエハ搬送装置に付設される作
業台および支持アームの一部を示す斜視図、第４
図はカンチレバーチユーブおよび支持レバーのウ
エハボートの受け渡しを示す図、第５図はプロセ
スチユーブに対するカンチレバーチユーブの移動
を示す図である。
２…カンチレバーチユーブ、４…切欠部、６…
ウエハボート、１２…プロセスチユーブ、３２…
半導体ウエハ、３４…支持アーム、３８…第１の
移動機構、４０…第２の移動機構。
FIG. 1 is a perspective view showing an embodiment of the wafer transfer device of this invention, FIG. 2 is a diagram showing the movement of the support arm in the wafer transfer device shown in FIG. 1, and FIG. 3 is a diagram showing the movement of the support arm in the wafer transfer device shown in FIG. A fourth perspective view showing a part of the work table and support arm attached to the wafer transfer device.
The figure shows the transfer of the cantilever tube and the support lever to the wafer boat, and FIG. 5 is a view showing the movement of the cantilever tube with respect to the process tube. 2... Cantilever tube, 4... Notch, 6...
Wafer boat, 12...process tube, 32...
Semiconductor wafer, 34... Support arm, 38... First moving mechanism, 40... Second moving mechanism.
Claims (1)
エハボートを支持して移動し、ウエハボートをプ
ロセスチユーブに対して搬出入するカンチレバー
チユーブと、 前記カンチレバーチユーブに対応して前記ウエ
ハボートを支持する支持アームと、 この支持アームを移動させて前記カンチレバー
チユーブの移動位置でカンチレバーチユーブとウ
エハボートの受け渡しを行う移動機構とを備えた
ことを特徴とするウエハ搬送装置。[Claims for Utility Model Registration] A cantilever tube that supports and moves a wafer boat between the edges of a notch formed at the lower part of the opening end to carry the wafer boat into and out of the process tube; and the cantilever tube. a support arm that supports the wafer boat in accordance with the above, and a movement mechanism that moves the support arm and transfers the cantilever tube and the wafer boat to and from the cantilever tube at the movement position of the cantilever tube. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18140587U JPH0186230U (en) | 1987-11-28 | 1987-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18140587U JPH0186230U (en) | 1987-11-28 | 1987-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0186230U true JPH0186230U (en) | 1989-06-07 |
Family
ID=31472889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18140587U Pending JPH0186230U (en) | 1987-11-28 | 1987-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0186230U (en) |
-
1987
- 1987-11-28 JP JP18140587U patent/JPH0186230U/ja active Pending