JPH0364938U - - Google Patents
Info
- Publication number
- JPH0364938U JPH0364938U JP12536089U JP12536089U JPH0364938U JP H0364938 U JPH0364938 U JP H0364938U JP 12536089 U JP12536089 U JP 12536089U JP 12536089 U JP12536089 U JP 12536089U JP H0364938 U JPH0364938 U JP H0364938U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- storage container
- suction
- suction part
- support part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 230000032258 transport Effects 0.000 claims 3
- 238000001179 sorption measurement Methods 0.000 description 2
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Description
第１図は本考案の半導体ウエハ用移替装置の一
実施例を示す斜視図、第２図ａないし第２図ｄは
本考案の半導体ウエハ用移替装置の使用状態を説
明するための説明図、第３図はウエハ移し替え作
業の一例を示す斜視図である。
１……ウエハ搬送装置、２……ウエハ、１０…
…半導体ウエハ用移替装置、１１……ウエハ収納
容器、１４……吸着部、１５……吸着部支持部、
１６……旋回支持部、Ｓ……移動機構。
FIG. 1 is a perspective view showing an embodiment of the semiconductor wafer transfer device of the present invention, and FIGS. 2a to 2d are illustrations for explaining the usage state of the semiconductor wafer transfer device of the present invention. 3 are perspective views showing an example of wafer transfer work. 1... Wafer transfer device, 2... Wafer, 10...
... Semiconductor wafer transfer device, 11... Wafer storage container, 14... Adsorption part, 15... Adsorption part support part,
16...Swivel support part, S...Movement mechanism.
Claims (1)
ハ収納容器と、ウエハ収納容器付近までウエハを
搬送するウエハ搬送装置と、該ウエハ搬送装置で
搬送されたウエハをウエハ収納容器に移し替える
ウエハ移替手段と、前記ウエハ収納容器を移動さ
せる移動機構とを備え、前記ウエハ移替手段は、
ウエハを吸着保持する吸着部と、この吸着部を支
持する吸着部支持部と、この吸着部支持部を回動
自在に、かつ、上下動可能に支持する旋回支持部
とを具備してなることを特徴とする半導体ウエハ
用移替装置。 A wafer storage container having an opening recess for storing a wafer, a wafer transport device that transports the wafer to the vicinity of the wafer storage container, and a wafer transfer means that transfers the wafer transported by the wafer transport device to the wafer storage container. and a moving mechanism for moving the wafer storage container, and the wafer transfer means includes:
A suction part that holds a wafer by suction, a suction part support part that supports this suction part, and a swing support part that supports this suction part support part in a rotatable and vertically movable manner. A semiconductor wafer transfer device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12536089U JPH0364938U (en) | 1989-10-26 | 1989-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12536089U JPH0364938U (en) | 1989-10-26 | 1989-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0364938U true JPH0364938U (en) | 1991-06-25 |
Family
ID=31673234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12536089U Pending JPH0364938U (en) | 1989-10-26 | 1989-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0364938U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6169144A (en) * | 1984-09-12 | 1986-04-09 | Nec Corp | Wafer prober |
-
1989
- 1989-10-26 JP JP12536089U patent/JPH0364938U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6169144A (en) * | 1984-09-12 | 1986-04-09 | Nec Corp | Wafer prober |