JPS63159838U - - Google Patents
Info
- Publication number
- JPS63159838U JPS63159838U JP5308887U JP5308887U JPS63159838U JP S63159838 U JPS63159838 U JP S63159838U JP 5308887 U JP5308887 U JP 5308887U JP 5308887 U JP5308887 U JP 5308887U JP S63159838 U JPS63159838 U JP S63159838U
- Authority
- JP
- Japan
- Prior art keywords
- platen
- wafer holding
- wafer
- base end
- holding surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims 1
Description
第１図は一実施例を示す断面図、第２図はエン
ドステーシヨンを示す概略図である。
２０……プラテン、２２……ウエハ、２４……
スライダ用の溝、２６……スライダ、２８……ス
ライダストツパ、３４……ウエハストツパ。
FIG. 1 is a sectional view showing one embodiment, and FIG. 2 is a schematic view showing an end station. 20... platen, 22... wafer, 24...
Groove for slider, 26... slider, 28... slider stopper, 34... wafer stopper.
Claims (1)
を保持するプラテンが基端部を中心として回動可
能に取りつけられており、前記プラテンのウエハ
保持面には基端部と先端部の間でウエハ保持面か
ら突出して移動可能なスライダが設けられ、前記
プラテンの基端部には前記スライダを基端部位置
に止めるスライダストツパが設けられ、前記プラ
テンの先端部にはウエハ保持面の上下に出没可能
なウエハストツパが設けられているウエハ保持機
構。 A platen that holds a wafer in an end station of an ion implantation device is rotatably mounted around a base end, and a wafer holding surface of the platen has a portion that protrudes from the wafer holding surface between the base end and the distal end. A slider is provided at the base end of the platen to stop the slider at the base end position, and a wafer stopper is provided at the front end of the platen and is retractable above and below the wafer holding surface. The wafer holding mechanism is equipped with a wafer holding mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5308887U JPS63159838U (en) | 1987-04-08 | 1987-04-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5308887U JPS63159838U (en) | 1987-04-08 | 1987-04-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63159838U true JPS63159838U (en) | 1988-10-19 |
Family
ID=30878834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5308887U Pending JPS63159838U (en) | 1987-04-08 | 1987-04-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63159838U (en) |
-
1987
- 1987-04-08 JP JP5308887U patent/JPS63159838U/ja active Pending