JPH0393089U - - Google Patents

Info

Publication number
JPH0393089U
JPH0393089U JP197390U JP197390U JPH0393089U JP H0393089 U JPH0393089 U JP H0393089U JP 197390 U JP197390 U JP 197390U JP 197390 U JP197390 U JP 197390U JP H0393089 U JPH0393089 U JP H0393089U
Authority
JP
Japan
Prior art keywords
wafer
suctions
slidably
maintain
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP197390U
Other languages
Japanese (ja)
Other versions
JP2535628Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990001973U priority Critical patent/JP2535628Y2/en
Publication of JPH0393089U publication Critical patent/JPH0393089U/ja
Application granted granted Critical
Publication of JP2535628Y2 publication Critical patent/JP2535628Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図ａは本考案の実施例におけるウエハー吸
着装置の側面図。第１図ｂは第１図ａの正面図。
第２図ａはウエハー保持器の正面図。第２図ｂは
第２図ａの側面図。第３図ａは従来のウエハー吸
着装置の側面図。第３図ｂは第３図ａの正面図。 １……吸着部、２……吸引パイプ、３，１３…
…ピンホルダー、４，１４……プツシヤーピン、
５，１５……軸、６，１６……回転体、７，１７
……軸、８，１８……スプリング、９，１９……
ストツパー、１０，１１，２０，２１……側板、
１２，２２……ホルダー、２３……電磁ブレーキ
、２４……保持器、２５……アーム取り付けホル
ダー、２６……ワイヤー、２７……吸着部取り付
けホルダー、２８……吸着部、ｗ……ウエハー、
θ１，θ２……傾き。 FIG. 1a is a side view of a wafer suction device according to an embodiment of the present invention. FIG. 1b is a front view of FIG. 1a.
FIG. 2a is a front view of the wafer holder. FIG. 2b is a side view of FIG. 2a. FIG. 3a is a side view of a conventional wafer suction device. FIG. 3b is a front view of FIG. 3a. 1...Adsorption part, 2...Suction pipe, 3, 13...
...Pin holder, 4,14... Pusher pin,
5,15...Axis, 6,16...Rotating body, 7,17
...Shaft, 8, 18... Spring, 9, 19...
Stopper, 10, 11, 20, 21... side plate,
12, 22... Holder, 23... Electromagnetic brake, 24... Holder, 25... Arm attachment holder, 26... Wire, 27... Adsorption part attachment holder, 28... Adsorption part, w... Wafer,
θ 1 , θ 2 ...Inclination.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ウエハー搬送装置の搬送アームに設けられた、真
空吸着部にウエハーを吸着するウエハー吸着装置
において、二軸の回転方向に摺動自在に支持する
とともに、摺動状態を任意の状態で保持できるこ
とを特徴とするウエハー吸着装置。A wafer suction device that suctions a wafer to a vacuum suction section provided on a transfer arm of a wafer transfer device is characterized by being able to support the wafer slidably in two rotational directions and to maintain the sliding state in any desired state. Wafer adsorption device.
JP1990001973U 1990-01-12 1990-01-12 Wafer suction device Expired - Lifetime JP2535628Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990001973U JP2535628Y2 (en) 1990-01-12 1990-01-12 Wafer suction device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990001973U JP2535628Y2 (en) 1990-01-12 1990-01-12 Wafer suction device

Publications (2)

Publication Number Publication Date
JPH0393089U true JPH0393089U (en) 1991-09-24
JP2535628Y2 JP2535628Y2 (en) 1997-05-14

Family

ID=31505857

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990001973U Expired - Lifetime JP2535628Y2 (en) 1990-01-12 1990-01-12 Wafer suction device

Country Status (1)

Country Link
JP (1) JP2535628Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013159430A (en) * 2012-02-02 2013-08-19 Honda Motor Co Ltd Workpiece receiver

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62136391A (en) * 1985-12-10 1987-06-19 株式会社東芝 Gripper
JPS632347A (en) * 1986-06-23 1988-01-07 Hitachi Ltd Hand
JPH01138545U (en) * 1988-03-07 1989-09-21

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62136391A (en) * 1985-12-10 1987-06-19 株式会社東芝 Gripper
JPS632347A (en) * 1986-06-23 1988-01-07 Hitachi Ltd Hand
JPH01138545U (en) * 1988-03-07 1989-09-21

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013159430A (en) * 2012-02-02 2013-08-19 Honda Motor Co Ltd Workpiece receiver

Also Published As

Publication number Publication date
JP2535628Y2 (en) 1997-05-14

Similar Documents

Publication Publication Date Title
JPH0393089U (en)
JPH0435890U (en)
JPH0368661U (en)
JPH0387740U (en)
JPH0285585U (en)
JPS63178331U (en)
JPH0157935U (en)
JPH0359189U (en)
JPS616355U (en) Vacuum cleaner suction body
JPH045645U (en)
JPS61112758U (en)
JPH0265341U (en)
JPH049736U (en)
JPH0326484U (en)
JPH0399439U (en)
JPS6377781U (en)
JPH01103352U (en)
JPH03104736U (en)
JPS5839944U (en) Construction material setting device
JPH0476638U (en)
JPH0323194U (en)
JPS6446818U (en)
JPH0339449U (en)
JPS62163958U (en)
JPS63158312U (en)

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term