JPS6292646U - - Google Patents
Info
- Publication number
- JPS6292646U JPS6292646U JP18412685U JP18412685U JPS6292646U JP S6292646 U JPS6292646 U JP S6292646U JP 18412685 U JP18412685 U JP 18412685U JP 18412685 U JP18412685 U JP 18412685U JP S6292646 U JPS6292646 U JP S6292646U
- Authority
- JP
- Japan
- Prior art keywords
- fork
- wafer
- mounting
- wafers
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 6
- 239000004065 semiconductor Substances 0.000 claims 1
Description
第１図は本考案の実施例の断面図、第２図はそ
の平面図である。
１……ウエハ、２……傘体、３……フオーク。
FIG. 1 is a sectional view of an embodiment of the present invention, and FIG. 2 is a plan view thereof. 1...Wafer, 2...Umbrella body, 3...Fork.
Claims (1)
るウエハ載置用フオークにおいて、該フオークに
対し、これに載置されるウエハの上面を覆う形に
、該フオークの載置面に平行な平板状の傘体を固
定したことを特徴とするウエハ載置用フオーク。 In a wafer mounting fork used to transport wafers in a semiconductor wafer processing apparatus, a flat umbrella body parallel to the mounting surface of the fork is provided to cover the upper surface of the wafer placed on the fork. A fork for mounting wafers, which is characterized by a fixed wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18412685U JPS6292646U (en) | 1985-11-29 | 1985-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18412685U JPS6292646U (en) | 1985-11-29 | 1985-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6292646U true JPS6292646U (en) | 1987-06-13 |
Family
ID=31131503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18412685U Pending JPS6292646U (en) | 1985-11-29 | 1985-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6292646U (en) |
-
1985
- 1985-11-29 JP JP18412685U patent/JPS6292646U/ja active Pending