JPS62103257U - - Google Patents
Info
- Publication number
- JPS62103257U JPS62103257U JP19664685U JP19664685U JPS62103257U JP S62103257 U JPS62103257 U JP S62103257U JP 19664685 U JP19664685 U JP 19664685U JP 19664685 U JP19664685 U JP 19664685U JP S62103257 U JPS62103257 U JP S62103257U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holder
- holder base
- base
- holding device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図はこの考案の一実施例に係るウエハ保持
装置を示す側面図であり、第２図はその平面図で
ある。第３図は、第１図の装置のウエハを保持し
た状態を示す側面図である。第４図は、ウエハ受
け回りの他の例を示す部分断面図である。第５図
は従来のウエハ保持装置の一例を示す縦断面図で
あり、第６図はその平面図である。
２……ウエハ、２２……ウエハ押え、３０，３
０′……ウエハ受け、３４……ホルダベース、４
２ａ，４２ｂ……操作軸、４４ａ，４４ｂ……レ
バー。
FIG. 1 is a side view showing a wafer holding device according to an embodiment of this invention, and FIG. 2 is a plan view thereof. FIG. 3 is a side view showing the apparatus of FIG. 1 in a state in which a wafer is held. FIG. 4 is a partial sectional view showing another example of the wafer receiver. FIG. 5 is a longitudinal sectional view showing an example of a conventional wafer holding device, and FIG. 6 is a plan view thereof. 2...Wafer, 22...Wafer holder, 30,3
0'...Wafer holder, 34...Holder base, 4
2a, 42b... operating shaft, 44a, 44b... lever.
Claims (1)
搬送されて来るホルダベースと、ホルダベースの
上方にあつてホルダベースに向けて弾性付勢され
ていてウエハの周辺部をホルダベースに向けて押
圧するウエハ押えと、ホルダベースとウエハ押え
の間にあつてその上にウエハが載置されるもので
ありウエハ押えの動きに応じてホルダベースに対
して上下するウエハ受けと、真空容器外からその
真空気密を保つた状態でウエハ押えをホルダベー
スから押し上げる押上げ機構とを備えることを特
徴とするウエハ保持装置。 A holder base provided in the vacuum container onto which the wafer is transferred; and a holder base located above the holder base that is elastically biased toward the holder base and presses the periphery of the wafer toward the holder base. a wafer holder, which is placed between the holder base and the wafer holder and on which the wafer is placed, and which moves up and down with respect to the holder base according to the movement of the wafer holder; A wafer holding device comprising a push-up mechanism that pushes up a wafer holder from a holder base while maintaining vacuum tightness.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19664685U JPS62103257U (en) | 1985-12-19 | 1985-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19664685U JPS62103257U (en) | 1985-12-19 | 1985-12-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62103257U true JPS62103257U (en) | 1987-07-01 |
Family
ID=31155656
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19664685U Pending JPS62103257U (en) | 1985-12-19 | 1985-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62103257U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0250954U (en) * | 1988-09-30 | 1990-04-10 |
-
1985
- 1985-12-19 JP JP19664685U patent/JPS62103257U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0250954U (en) * | 1988-09-30 | 1990-04-10 |