JPH0250954U - - Google Patents

Info

Publication number
JPH0250954U
JPH0250954U JP12888588U JP12888588U JPH0250954U JP H0250954 U JPH0250954 U JP H0250954U JP 12888588 U JP12888588 U JP 12888588U JP 12888588 U JP12888588 U JP 12888588U JP H0250954 U JPH0250954 U JP H0250954U
Authority
JP
Japan
Prior art keywords
plane
wafer
pressing force
holder
positioning member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12888588U
Other languages
Japanese (ja)
Other versions
JPH0728693Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988128885U priority Critical patent/JPH0728693Y2/en
Publication of JPH0250954U publication Critical patent/JPH0250954U/ja
Application granted granted Critical
Publication of JPH0728693Y2 publication Critical patent/JPH0728693Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案実施例の要部縦断面図、第２図
はその―矢視図、第３図は作用を説明するた
めの要部縦断面図、第４図および第５図はバツチ
式のデイスクの従来の構造例を示す断面図である
。 １……デイスク、１ａ……上面、２……クラン
プ板、３…３……位置決めピン、３ａ…３ａ……
テーパ面、４，９……スプリング、Ｗ…Ｗ……ウ
エハ。 Fig. 1 is a vertical sectional view of the main part of the embodiment of the present invention, Fig. 2 is a view taken along the - arrow, Fig. 3 is a longitudinal sectional view of the main part for explaining the operation, and Figs. 4 and 5 are a batch diagram. 1 is a cross-sectional view showing an example of a conventional structure of a disk of the type shown in FIG. 1...Disk, 1a...Top surface, 2...Clamp plate, 3...3...Positioning pin, 3a...3a...
Tapered surface, 4, 9...spring, W...W...wafer.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] イオン注入装置等においてウエハを所定位置に
保持するための保持具であつて、平面が形成され
た支持台と、その支持台に配設され、上記平面に
対して上下移動自在で、かつ、弾性体の押圧力に
よつて一部が突出し、その突出部に保持すべきウ
エハを上記平面上に位置決めするための面が形成
された位置決め部材と、その位置決め部材上に上
記平面に対して接近離反自在に配設されたクラン
プ板と、そのクランプ板に上記平面に向う、上記
弾性体の押圧力よりも強い押圧力を与える手段を
備えていることを特徴とする、ウエハ保持具。 A holder for holding a wafer in a predetermined position in an ion implantation device, etc., which includes a support base on which a flat surface is formed, and a holder that is disposed on the support base, is movable up and down with respect to the flat surface, and is elastic. a positioning member that partially protrudes due to the pressing force of the body and has a surface formed in the protrusion for positioning the wafer to be held on the plane, and a positioning member on the positioning member that moves toward and away from the plane. A wafer holder comprising a freely disposed clamp plate and means for applying a pressing force to the clamp plate toward the plane that is stronger than the pressing force of the elastic body.
JP1988128885U 1988-09-30 1988-09-30 Wafer holder Expired - Lifetime JPH0728693Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988128885U JPH0728693Y2 (en) 1988-09-30 1988-09-30 Wafer holder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988128885U JPH0728693Y2 (en) 1988-09-30 1988-09-30 Wafer holder

Publications (2)

Publication Number Publication Date
JPH0250954U true JPH0250954U (en) 1990-04-10
JPH0728693Y2 JPH0728693Y2 (en) 1995-06-28

Family

ID=31382641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988128885U Expired - Lifetime JPH0728693Y2 (en) 1988-09-30 1988-09-30 Wafer holder

Country Status (1)

Country Link
JP (1) JPH0728693Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006073963A (en) * 2004-09-06 2006-03-16 Tokyo Electron Ltd Wafer chuck
JP2015079859A (en) * 2013-10-17 2015-04-23 株式会社ディスコ Workpiece holding mechanism

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62103257U (en) * 1985-12-19 1987-07-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62103257U (en) * 1985-12-19 1987-07-01

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006073963A (en) * 2004-09-06 2006-03-16 Tokyo Electron Ltd Wafer chuck
JP4559801B2 (en) * 2004-09-06 2010-10-13 東京エレクトロン株式会社 Wafer chuck
JP2015079859A (en) * 2013-10-17 2015-04-23 株式会社ディスコ Workpiece holding mechanism

Also Published As

Publication number Publication date
JPH0728693Y2 (en) 1995-06-28

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