JPH0251059U - - Google Patents
Info
- Publication number
- JPH0251059U JPH0251059U JP12821788U JP12821788U JPH0251059U JP H0251059 U JPH0251059 U JP H0251059U JP 12821788 U JP12821788 U JP 12821788U JP 12821788 U JP12821788 U JP 12821788U JP H0251059 U JPH0251059 U JP H0251059U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- holding
- holder
- holding plate
- grindstone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 2
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Description
図面は本考案に係る半導体ウエハの保持ホルダ
の実施例を示す断面図である。
３，４……ホールド板、３１，４１……当接面
、３２，４２……中空部、３３，４３……外周部
、Ａ……半導体ウエハ、Ｂ……砥石。
The drawing is a sectional view showing an embodiment of a semiconductor wafer holding holder according to the present invention. 3, 4... Hold plate, 31, 41... Contact surface, 32, 42... Hollow part, 33, 43... Outer peripheral part, A... Semiconductor wafer, B... Grindstone.
Claims (1)
導体ウエハを表裏から挾持するホールド板を備え
た半導体ウエハの保持ホルダにおいて、ホールド
板の半導体ウエハへの当接面に中空部を形成して
その外周部のみが半導体ウエハに当接するように
したことを特徴とする半導体ウエハの保持ホルダ
。 In a semiconductor wafer holding holder equipped with a holding plate that holds the semiconductor wafer from the front and back in order to grind the peripheral edge of the semiconductor wafer with a grindstone, a hollow part is formed in the contact surface of the holding plate to the semiconductor wafer, and the outer periphery of the holding plate is A holder for holding a semiconductor wafer, characterized in that only one part of the holder contacts the semiconductor wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12821788U JPH0251059U (en) | 1988-09-29 | 1988-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12821788U JPH0251059U (en) | 1988-09-29 | 1988-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0251059U true JPH0251059U (en) | 1990-04-10 |
Family
ID=31381347
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12821788U Pending JPH0251059U (en) | 1988-09-29 | 1988-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0251059U (en) |
-
1988
- 1988-09-29 JP JP12821788U patent/JPH0251059U/ja active Pending