JPS6236531U - - Google Patents
Info
- Publication number
- JPS6236531U JPS6236531U JP12705085U JP12705085U JPS6236531U JP S6236531 U JPS6236531 U JP S6236531U JP 12705085 U JP12705085 U JP 12705085U JP 12705085 U JP12705085 U JP 12705085U JP S6236531 U JPS6236531 U JP S6236531U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- mask
- aligner
- mask aligner
- chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
Description
第１図はこの考案の一実施例の要部断面図、第
２図は第１図のマスクアライナを使用したパター
ン測定結果を表わす図、第３図は従来のマスクア
ライナの要部断面図、第４図は従来のマスクアラ
イナを使用したパターン測定結果を表わす図であ
る。
１０……ウエーハチヤツク、２０……ウエーハ
載置面、２５……ウエーハ載置面の周辺部、３０
……ウエーハ、４０……マスクホルダ、５０……
マスク。
FIG. 1 is a cross-sectional view of a main part of an embodiment of this invention, FIG. 2 is a diagram showing pattern measurement results using the mask aligner of FIG. 1, and FIG. FIG. 4 is a diagram showing pattern measurement results using a conventional mask aligner. 10...Wafer rack, 20...Wafer placement surface, 25...Periphery of wafer placement surface, 30
...Wafer, 40...Mask holder, 50...
mask.
Claims (1)
ホルダによつて把持されたマスクとを位置決めし
て密着させ露光をおこなうマスクアライナにおい
て、前記ウエーハチヤツクのウエーハ載置面をそ
の周辺部においてウエーハ側に湾曲させたことを
特徴とするマスクアライナ。 In a mask aligner that positions and brings a wafer placed on a wafer chuck and a mask held by a mask holder into close contact for exposure, the wafer mounting surface of the wafer chuck is curved toward the wafer at its periphery. Features of mask aligner.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12705085U JPS6236531U (en) | 1985-08-20 | 1985-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12705085U JPS6236531U (en) | 1985-08-20 | 1985-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6236531U true JPS6236531U (en) | 1987-03-04 |
Family
ID=31021431
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12705085U Pending JPS6236531U (en) | 1985-08-20 | 1985-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6236531U (en) |
-
1985
- 1985-08-20 JP JP12705085U patent/JPS6236531U/ja active Pending
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