JPS6236531U - - Google Patents
Info
- Publication number
- JPS6236531U JPS6236531U JP12705085U JP12705085U JPS6236531U JP S6236531 U JPS6236531 U JP S6236531U JP 12705085 U JP12705085 U JP 12705085U JP 12705085 U JP12705085 U JP 12705085U JP S6236531 U JPS6236531 U JP S6236531U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- mask
- aligner
- mask aligner
- chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
Description
第1図はこの考案の一実施例の要部断面図、第
2図は第1図のマスクアライナを使用したパター
ン測定結果を表わす図、第3図は従来のマスクア
ライナの要部断面図、第4図は従来のマスクアラ
イナを使用したパターン測定結果を表わす図であ
る。
10……ウエーハチヤツク、20……ウエーハ
載置面、25……ウエーハ載置面の周辺部、30
……ウエーハ、40……マスクホルダ、50……
マスク。
FIG. 1 is a cross-sectional view of a main part of an embodiment of this invention, FIG. 2 is a diagram showing pattern measurement results using the mask aligner of FIG. 1, and FIG. FIG. 4 is a diagram showing pattern measurement results using a conventional mask aligner. 10...Wafer rack, 20...Wafer placement surface, 25...Periphery of wafer placement surface, 30
...Wafer, 40...Mask holder, 50...
mask.
Claims (1)
ホルダによつて把持されたマスクとを位置決めし
て密着させ露光をおこなうマスクアライナにおい
て、前記ウエーハチヤツクのウエーハ載置面をそ
の周辺部においてウエーハ側に湾曲させたことを
特徴とするマスクアライナ。 In a mask aligner that positions and brings a wafer placed on a wafer chuck and a mask held by a mask holder into close contact for exposure, the wafer mounting surface of the wafer chuck is curved toward the wafer at its periphery. Features of mask aligner.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12705085U JPS6236531U (en) | 1985-08-20 | 1985-08-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12705085U JPS6236531U (en) | 1985-08-20 | 1985-08-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6236531U true JPS6236531U (en) | 1987-03-04 |
Family
ID=31021431
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12705085U Pending JPS6236531U (en) | 1985-08-20 | 1985-08-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6236531U (en) |
-
1985
- 1985-08-20 JP JP12705085U patent/JPS6236531U/ja active Pending
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