JPH0312439U - - Google Patents
Info
- Publication number
- JPH0312439U JPH0312439U JP7285189U JP7285189U JPH0312439U JP H0312439 U JPH0312439 U JP H0312439U JP 7285189 U JP7285189 U JP 7285189U JP 7285189 U JP7285189 U JP 7285189U JP H0312439 U JPH0312439 U JP H0312439U
- Authority
- JP
- Japan
- Prior art keywords
- base
- semiconductor wafer
- fixed roller
- roller pins
- positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 4
- 235000012431 wafers Nutrition 0.000 claims 4
Description
第１図ａは本考案の実施例１を示す平面図、第
１図ｂ，ｃは同断面図、第２図は本考案の実施例
２を示す断面図、第３図ａ，ｂは従来のウエハー
位置決め装置を示す平面図である。
１ａ，１ｂ……固定ローラピン、２……ベース
、３……チヤツク、３ｂ……昇降機構、４ａ，４
ｂ……カム、４……回転リング、５……モータ、
７ａ，７ｂ……ウエハー、８……プツシユローラ
ピン。
Figure 1a is a plan view showing Embodiment 1 of the present invention, Figures 1b and c are sectional views of the same, Figure 2 is a sectional view of Embodiment 2 of the invention, and Figures 3a and b are conventional FIG. 2 is a plan view showing a wafer positioning device of FIG. 1a, 1b...fixed roller pin, 2...base, 3...chuck, 3b...lifting mechanism, 4a, 4
b...Cam, 4...Rotating ring, 5...Motor,
7a, 7b...Wafer, 8...Push roller pin.
Claims (1)
み分ずつ高さを異ならせて整列した半導体ウエハ
ー位置決め用固定ローラピンの組と、前記固定ロ
ーラピンを受け入れるピン孔を備え前記ベースに
対し昇降する半導体ウエハー載置用チヤツクとを
有することを特徴とする投影露光装置の半導体ウ
エハー位置決め装置。 a base, a set of fixed roller pins for positioning semiconductor wafers arranged on the base at different heights corresponding to the thickness of the semiconductor wafer, and a semiconductor wafer mounting device that is provided with a pin hole for receiving the fixed roller pins and that moves up and down with respect to the base. 1. A semiconductor wafer positioning device for a projection exposure apparatus, characterized in that it has a chuck.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7285189U JPH0312439U (en) | 1989-06-21 | 1989-06-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7285189U JPH0312439U (en) | 1989-06-21 | 1989-06-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0312439U true JPH0312439U (en) | 1991-02-07 |
Family
ID=31611156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7285189U Pending JPH0312439U (en) | 1989-06-21 | 1989-06-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0312439U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002080267A (en) * | 2000-09-08 | 2002-03-19 | Yoshiteru Matsubara | Porous ceramic and its manufacturing method |
| JP2008192963A (en) * | 2007-02-07 | 2008-08-21 | Oki Electric Ind Co Ltd | Positioning method of guide member and positioning method of substrate |
| JP2009054269A (en) * | 2007-08-02 | 2009-03-12 | Ricoh Co Ltd | Rotation mechanism and electron beam lithography device |
| JP2012028814A (en) * | 2011-10-24 | 2012-02-09 | Lintec Corp | Sheet peeling device |
| JP2015095542A (en) * | 2013-11-12 | 2015-05-18 | 株式会社ディスコ | Positioning table |
| JP2017069263A (en) * | 2015-09-28 | 2017-04-06 | 株式会社Ｓｃｒｅｅｎホールディングス | Substrate holding device |
-
1989
- 1989-06-21 JP JP7285189U patent/JPH0312439U/ja active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002080267A (en) * | 2000-09-08 | 2002-03-19 | Yoshiteru Matsubara | Porous ceramic and its manufacturing method |
| JP4489919B2 (en) * | 2000-09-08 | 2010-06-23 | 善輝 松原 | Method for producing porous ceramics |
| JP2008192963A (en) * | 2007-02-07 | 2008-08-21 | Oki Electric Ind Co Ltd | Positioning method of guide member and positioning method of substrate |
| JP2009054269A (en) * | 2007-08-02 | 2009-03-12 | Ricoh Co Ltd | Rotation mechanism and electron beam lithography device |
| JP2012028814A (en) * | 2011-10-24 | 2012-02-09 | Lintec Corp | Sheet peeling device |
| JP2015095542A (en) * | 2013-11-12 | 2015-05-18 | 株式会社ディスコ | Positioning table |
| JP2017069263A (en) * | 2015-09-28 | 2017-04-06 | 株式会社Ｓｃｒｅｅｎホールディングス | Substrate holding device |