JPH01100446U - - Google Patents

Info

Publication number
JPH01100446U
JPH01100446U JP19519587U JP19519587U JPH01100446U JP H01100446 U JPH01100446 U JP H01100446U JP 19519587 U JP19519587 U JP 19519587U JP 19519587 U JP19519587 U JP 19519587U JP H01100446 U JPH01100446 U JP H01100446U
Authority
JP
Japan
Prior art keywords
wafer
arm
prevent
transfer arm
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19519587U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19519587U priority Critical patent/JPH01100446U/ja
Publication of JPH01100446U publication Critical patent/JPH01100446U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は、この考案の一実施例によるウエハ搬
送アームを示す平面図、第２図は第１図―線
における断面図、第３図は従来のウエハ搬送アー
ムを示す平面図、第４図は第３図―線におけ
る断面図である。 図において、１は搬送アーム、３はウエハ、４
は位置決めピンである。なお、図中、同一符号は
同一、又は相当部分を示す。 FIG. 1 is a plan view showing a wafer transfer arm according to an embodiment of the invention, FIG. 2 is a sectional view taken along the line shown in FIG. 1, FIG. 3 is a plan view showing a conventional wafer transfer arm, and FIG. is a sectional view taken along the line of FIG. In the figure, 1 is a transfer arm, 3 is a wafer, and 4 is a transfer arm.
is a positioning pin. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.

Claims (1)

【実用新案登録請求の範囲】 (1) ウエハを載置して、円周方向の所定位置に
移送する回転アーム搬送装置において、遠心力に
よる、ウエハのずれを防止する位置決めピンを備
えたことを特徴とするウエハ搬送アーム。 (2) ウエハをアームに載置する部分を樹脂等に
したことによりウエハの金属接触を防止したこと
を特徴とする実用新案登録請求の範囲第１項に記
載のウエハ搬送アーム。[Claims for Utility Model Registration] (1) A rotating arm transfer device that places a wafer and transfers it to a predetermined position in the circumferential direction is provided with positioning pins to prevent the wafer from shifting due to centrifugal force. Features a wafer transfer arm. (2) The wafer transfer arm according to claim 1, which is a registered utility model, characterized in that the portion on which the wafer is placed on the arm is made of resin or the like to prevent wafers from coming into contact with metal.
JP19519587U 1987-12-23 1987-12-23 Pending JPH01100446U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19519587U JPH01100446U (en) 1987-12-23 1987-12-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19519587U JPH01100446U (en) 1987-12-23 1987-12-23

Publications (1)

Publication Number Publication Date
JPH01100446U true JPH01100446U (en) 1989-07-05

Family

ID=31485885

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19519587U Pending JPH01100446U (en) 1987-12-23 1987-12-23

Country Status (1)

Country Link
JP (1) JPH01100446U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0452743U (en) * 1990-09-10 1992-05-06
JPH07169818A (en) * 1994-09-19 1995-07-04 Sony Corp Wafer carrying tool
JP2004200678A (en) * 2002-12-05 2004-07-15 Tokyo Electron Ltd Removable semiconductor wafer susceptor
JP2017224657A (en) * 2016-06-13 2017-12-21 東京エレクトロン株式会社 Substrate transfer device and substrate transfer method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0452743U (en) * 1990-09-10 1992-05-06
JPH07169818A (en) * 1994-09-19 1995-07-04 Sony Corp Wafer carrying tool
JP2004200678A (en) * 2002-12-05 2004-07-15 Tokyo Electron Ltd Removable semiconductor wafer susceptor
JP4637475B2 (en) * 2002-12-05 2011-02-23 東京エレクトロン株式会社 Semiconductor substrate transfer system using removable susceptor, and semiconductor substrate transfer method
JP2017224657A (en) * 2016-06-13 2017-12-21 東京エレクトロン株式会社 Substrate transfer device and substrate transfer method

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