JPS6379646U - - Google Patents

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Publication number
JPS6379646U
JPS6379646U JP13766986U JP13766986U JPS6379646U JP S6379646 U JPS6379646 U JP S6379646U JP 13766986 U JP13766986 U JP 13766986U JP 13766986 U JP13766986 U JP 13766986U JP S6379646 U JPS6379646 U JP S6379646U
Authority
JP
Japan
Prior art keywords
base plate
wafer boat
transfer device
top surface
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13766986U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13766986U priority Critical patent/JPS6379646U/ja
Publication of JPS6379646U publication Critical patent/JPS6379646U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は、半導体ウエハー処理装置の要部概略
図、第２図は、本考案に係る転載装置の側面概略
図、第３図は、同斜視図、第４図は、他の実施例
の斜視図、第５図は、従来の転載装置の側面概略
図である。 尚、図中１はウエハーボート、２は台板、２ａ
は台板回転中心、２ｂは傾斜面、３は回転軸、４
は外周縁、５は転載装置である。 FIG. 1 is a schematic diagram of the main parts of a semiconductor wafer processing apparatus, FIG. 2 is a schematic side view of a transfer device according to the present invention, FIG. 3 is a perspective view of the same, and FIG. 4 is a diagram of another embodiment. The perspective view, FIG. 5, is a schematic side view of a conventional transfer device. In the figure, 1 is a wafer boat, 2 is a base plate, and 2a
is the base plate rotation center, 2b is the inclined surface, 3 is the rotation axis, 4
5 is the outer periphery, and 5 is a transfer device.

Claims (1)

【実用新案登録請求の範囲】 (1) ウエハーボートを台板上に載置して回転す
る転載装置において、該台板上面には外周縁から
回転中心方向に下り勾配の傾斜面が形成されたこ
とを特徴とするウエハーボートの載置装置。 (2) 前記台板は上面中央が窪んだ円板状に形成
された実用新案登録請求の範囲第１項記載のウエ
ハーボートの転載装置。 (3) 前記台板は一対の翼板を回転軸に対して対
称に設けた実用新案登録請求の範囲第１項記載の
ウエハーボートの転載装置。[Claims for Utility Model Registration] (1) A transfer device in which a wafer boat is placed on a base plate and rotated, in which an inclined surface is formed on the top surface of the base plate, sloping downward from the outer periphery toward the center of rotation. A wafer boat mounting device characterized by: (2) The wafer boat transfer device according to claim 1, wherein the base plate is formed into a disk shape with a concave center on the top surface. (3) The wafer boat transfer device according to claim 1, wherein the base plate has a pair of vanes arranged symmetrically with respect to the rotation axis.
JP13766986U 1985-12-04 1986-09-08 Pending JPS6379646U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13766986U JPS6379646U (en) 1985-12-04 1986-09-08

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP18713785 1985-12-04
JP13766986U JPS6379646U (en) 1985-12-04 1986-09-08

Publications (1)

Publication Number Publication Date
JPS6379646U true JPS6379646U (en) 1988-05-26

Family

ID=33455147

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13766986U Pending JPS6379646U (en) 1985-12-04 1986-09-08

Country Status (1)

Country Link
JP (1) JPS6379646U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02263454A (en) * 1989-03-20 1990-10-26 Tel Sagami Ltd Transferring method
JPH05174776A (en) * 1991-12-20 1993-07-13 Hitachi Ltd Load locking chamber of semiconductor processing device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02263454A (en) * 1989-03-20 1990-10-26 Tel Sagami Ltd Transferring method
JPH05174776A (en) * 1991-12-20 1993-07-13 Hitachi Ltd Load locking chamber of semiconductor processing device

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