JPS62138444U - - Google Patents
Info
- Publication number
- JPS62138444U JPS62138444U JP2560286U JP2560286U JPS62138444U JP S62138444 U JPS62138444 U JP S62138444U JP 2560286 U JP2560286 U JP 2560286U JP 2560286 U JP2560286 U JP 2560286U JP S62138444 U JPS62138444 U JP S62138444U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- center
- base plate
- transfer device
- gravity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005484 gravity Effects 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 5
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は、本考案に係る転載装置の概略図、第
２図は、従来の転載装置を説明する概略図である
。
尚、図中１は転載装置、２１は台板、２２は吸
着盤、２３はガイド、３１は回転軸、３２は駆動
部、Ｗはウエハー、Ｇはウエハーの重心、Ｃは回
転中心軸である。
FIG. 1 is a schematic diagram of a transshipment device according to the present invention, and FIG. 2 is a schematic diagram illustrating a conventional transshipment device. In the figure, 1 is a transfer device, 21 is a base plate, 22 is a suction plate, 23 is a guide, 31 is a rotating shaft, 32 is a drive unit, W is a wafer, G is the center of gravity of the wafer, and C is the center axis of rotation. .
Claims (1)
回転させる転載装置であつて、吸着盤を介して半
導体ウエハーを載置させると共に、該台板を移動
させることにより半導体ウエハーの重心を回転中
心軸に一致させた状態で回転させることを特徴と
する半導体ウエハーの転載装置。 A transfer device that places a semiconductor wafer on a base plate and rotates it in a predetermined direction.The semiconductor wafer is placed on a suction cup and the base plate is moved to adjust the center of gravity of the semiconductor wafer to the center of rotation. A semiconductor wafer transfer device that is characterized by rotating a semiconductor wafer while aligned with an axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2560286U JPS62138444U (en) | 1986-02-24 | 1986-02-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2560286U JPS62138444U (en) | 1986-02-24 | 1986-02-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62138444U true JPS62138444U (en) | 1987-09-01 |
Family
ID=30825907
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2560286U Pending JPS62138444U (en) | 1986-02-24 | 1986-02-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62138444U (en) |
-
1986
- 1986-02-24 JP JP2560286U patent/JPS62138444U/ja active Pending
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