JPH0187540U - - Google Patents
Info
- Publication number
- JPH0187540U JPH0187540U JP18367287U JP18367287U JPH0187540U JP H0187540 U JPH0187540 U JP H0187540U JP 18367287 U JP18367287 U JP 18367287U JP 18367287 U JP18367287 U JP 18367287U JP H0187540 U JPH0187540 U JP H0187540U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- fixing claw
- heat plate
- wafer fixing
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000078 claw Anatomy 0.000 claims description 4
- 230000017525 heat dissipation Effects 0.000 claims description 2
Description
第１図は本考案の一実施例に係るウエハ保持機
構を示す平面図、第２図は第１図の固定爪部分の
断面図である。
１：ヒートプレート、２：ウエハ、３，４，５
：ウエハ固定爪、６，７，８：移動機構、１１，
１２：放熱リール、１５：冷却器。
FIG. 1 is a plan view showing a wafer holding mechanism according to an embodiment of the present invention, and FIG. 2 is a sectional view of the fixing claw portion of FIG. 1. 1: heat plate, 2: wafer, 3, 4, 5
: Wafer fixing claw, 6, 7, 8: Moving mechanism, 11,
12: Heat dissipation reel, 15: Cooler.
Claims (1)
に回転力を伝達するウエハ固定爪と、該ウエハ固
定爪をヒートプレートの中心に向つて求心運動さ
せる移動機構とを備え、上記ウエハ固定爪はワイ
ヤ及び冷却器上に設けた放熱リールを介してモー
タに連結されることを特徴とするウエハ保持機構
。 The wafer fixing claw is rotatably provided on the heat plate and transmits rotational force to the wafer, and the moving mechanism moves the wafer fixing claw centripetally toward the center of the heat plate. A wafer holding mechanism characterized in that it is connected to a motor via a heat dissipation reel provided on the device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18367287U JPH0187540U (en) | 1987-12-01 | 1987-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18367287U JPH0187540U (en) | 1987-12-01 | 1987-12-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187540U true JPH0187540U (en) | 1989-06-09 |
Family
ID=31475085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18367287U Pending JPH0187540U (en) | 1987-12-01 | 1987-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187540U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11312727A (en) * | 1998-02-25 | 1999-11-09 | Anelva Corp | Multi-chamber substrate processor |
| KR100558774B1 (en) * | 1997-07-15 | 2007-04-25 | 동경 엘렉트론 주식회사 | Positioning device and positioning method |
-
1987
- 1987-12-01 JP JP18367287U patent/JPH0187540U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100558774B1 (en) * | 1997-07-15 | 2007-04-25 | 동경 엘렉트론 주식회사 | Positioning device and positioning method |
| JPH11312727A (en) * | 1998-02-25 | 1999-11-09 | Anelva Corp | Multi-chamber substrate processor |
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