JPS61199041U - - Google Patents
Info
- Publication number
- JPS61199041U JPS61199041U JP8342085U JP8342085U JPS61199041U JP S61199041 U JPS61199041 U JP S61199041U JP 8342085 U JP8342085 U JP 8342085U JP 8342085 U JP8342085 U JP 8342085U JP S61199041 U JPS61199041 U JP S61199041U
- Authority
- JP
- Japan
- Prior art keywords
- cradle
- type drying
- spin
- turntable
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001035 drying Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Drying Of Solid Materials (AREA)
Description
第１図および第２図は、本考案の実施例を示す
スピン型乾燥装置の概略説明図である。第３図は
従来のスピン型乾燥装置の概略説明図、第４図は
第３図に示すクレードルの斜視図である。
１０……容器、１２……駆動モータ、１４……
ターンテーブル、１５……ストツパー、１６……
支持枠、１７……穴、１８……クレードル、１９
……開口、２０……回転軸、２２……クレードル
起こし。
FIGS. 1 and 2 are schematic explanatory diagrams of a spin type drying apparatus showing an embodiment of the present invention. FIG. 3 is a schematic explanatory diagram of a conventional spin type drying device, and FIG. 4 is a perspective view of the cradle shown in FIG. 3. 10... Container, 12... Drive motor, 14...
Turntable, 15... Stopper, 16...
Support frame, 17...hole, 18...cradle, 19
...Opening, 20...Rotation axis, 22...Cradle raising.
Claims (1)
クレードルと、該クレードルの姿勢を転換させる
クレードル起こしとを有する半導体ウエハのスピ
ン型乾燥装置において、 前記クレードルは開口部近傍に回転軸を持つこ
とを特徴とするスピン型乾燥装置。[Claims for Utility Model Registration] A semiconductor wafer spin-type drying apparatus having a cradle rotatably mounted on a turntable and a cradle raiser for changing the posture of the cradle, wherein the cradle is rotated near an opening. A spin type drying device characterized by having a shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8342085U JPH0322910Y2 (en) | 1985-06-04 | 1985-06-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8342085U JPH0322910Y2 (en) | 1985-06-04 | 1985-06-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61199041U true JPS61199041U (en) | 1986-12-12 |
| JPH0322910Y2 JPH0322910Y2 (en) | 1991-05-20 |
Family
ID=30632036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8342085U Expired JPH0322910Y2 (en) | 1985-06-04 | 1985-06-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0322910Y2 (en) |
-
1985
- 1985-06-04 JP JP8342085U patent/JPH0322910Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0322910Y2 (en) | 1991-05-20 |