JPH02145990U - - Google Patents
Info
- Publication number
- JPH02145990U JPH02145990U JP5636289U JP5636289U JPH02145990U JP H02145990 U JPH02145990 U JP H02145990U JP 5636289 U JP5636289 U JP 5636289U JP 5636289 U JP5636289 U JP 5636289U JP H02145990 U JPH02145990 U JP H02145990U
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- outer shaft
- motor
- holding cylinder
- bearing holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011553 magnetic fluid Substances 0.000 claims description 2
Landscapes
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
Description
第１図は本考案に係る一実施例の概略斜視図、
第２図は該実施例の部分断面図、第３図は従来例
の概略斜視図である。
１……真空容器、９……軸受保持筒、１１……
外軸、１３……中軸、１４，１５……磁性流体シ
ール、１６……第１アーム、１９……第２アーム
、２３……回転基板、２５……副回転基板、２６
……第１モータ、３３……固定基板、３５……副
固定基板、３９……第２モータを示す。
FIG. 1 is a schematic perspective view of one embodiment of the present invention;
FIG. 2 is a partial sectional view of the embodiment, and FIG. 3 is a schematic perspective view of the conventional example. 1... Vacuum container, 9... Bearing holding cylinder, 11...
Outer shaft, 13... Central shaft, 14, 15... Magnetic fluid seal, 16... First arm, 19... Second arm, 23... Rotating board, 25... Sub rotating board, 26
. . . first motor, 33 . . . fixed board, 35 . . . auxiliary fixed board, 39 . . . second motor.
Claims (1)
を回転自在に設けると共に該外軸に同心の中軸を
回転自在に設け、前記軸受保持筒と外軸との間に
、又外軸と中軸との間にそれぞれ磁性流体シール
を設け、前記中軸に第１アームを固着し、前記外
軸と第２アームの回転軸をベルトにより連結し、
前記外軸に回転基板を介して第１モータを取付け
、該第１モータにより前記中軸を回転させる様に
し、前記軸受保持筒に固定基板を介して第２モー
タを取付け、該第２モータにより前記外軸を回転
させる様にしたことを特徴とする真空内用搬送装
置。 An outer shaft is rotatably provided in a bearing holding cylinder provided through the vacuum container, and a central shaft concentric with the outer shaft is rotatably provided, and a shaft is provided between the bearing holding cylinder and the outer shaft, and between the outer shaft and the central shaft. a magnetic fluid seal is provided between each, a first arm is fixed to the center shaft, and a rotation axis of the outer shaft and the second arm is connected by a belt;
A first motor is attached to the outer shaft via a rotating board, the first motor rotates the inner shaft, a second motor is attached to the bearing holding cylinder via a fixed board, and the second motor rotates the inner shaft. A vacuum transfer device characterized by a rotating outer shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5636289U JPH02145990U (en) | 1989-05-16 | 1989-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5636289U JPH02145990U (en) | 1989-05-16 | 1989-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02145990U true JPH02145990U (en) | 1990-12-11 |
Family
ID=31580120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5636289U Pending JPH02145990U (en) | 1989-05-16 | 1989-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02145990U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009153253A (en) * | 2007-12-19 | 2009-07-09 | Daihen Corp | Vacuum feeding apparatus |
| JP2015121265A (en) * | 2013-12-24 | 2015-07-02 | キヤノントッキ株式会社 | Magnetic fluid bearing device and vacuum chamber |
-
1989
- 1989-05-16 JP JP5636289U patent/JPH02145990U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009153253A (en) * | 2007-12-19 | 2009-07-09 | Daihen Corp | Vacuum feeding apparatus |
| JP2015121265A (en) * | 2013-12-24 | 2015-07-02 | キヤノントッキ株式会社 | Magnetic fluid bearing device and vacuum chamber |