JPS61188354U

JPS61188354U -

Info

Publication number: JPS61188354U
Application number: JP7279985U
Authority: JP
Priority date: 1985-05-16
Filing date: 1985-05-16
Publication date: 1986-11-25
Also published as: JPH0316278Y2

Description

[Brief explanation of the drawing]

第１図は本考案の実施例に係る乾燥装置の縦断
面図、第２図は従来の乾燥装置の縦断面図、第３
図は第２図の乾燥装置におけるクレードルの斜視
図、第４図は第１図の乾燥装置におけるヤレード
ルの斜視図、第５図は第１図の乾燥装置における
クレードル位置選定装置の構造図、第６図はロボ
ツトアームから第１図の乾燥装置における支持体
に対して半導体ウエハを移し替えする場合の説明
図、第７図は本考案の他の実施例に係るクレード
ル位置選定装置及び半導体ウエハ支持装置の構造
図である。２……容器、３……ターンテーブル、６……モ
ータ、１２……クレードル、１２Ｂ……溝、１３
……半導体ウエハ、１４，３４……クレードル位
置選定装置、１７，３７……半導体ウエハ支持装
置、１９Ａ……支持体。 FIG. 1 is a vertical cross-sectional view of a drying device according to an embodiment of the present invention, FIG. 2 is a vertical cross-sectional view of a conventional drying device, and FIG.
The figures are a perspective view of the cradle in the drying device shown in FIG. 2, FIG. 4 is a perspective view of the cradle in the drying device shown in FIG. 1, FIG. 5 is a structural diagram of the cradle positioning device in the drying device shown in FIG. FIG. 6 is an explanatory diagram when transferring a semiconductor wafer from the robot arm to the support in the drying device shown in FIG. 1, and FIG. 7 is a cradle positioning device and semiconductor wafer support according to another embodiment of the present invention. FIG. 2 is a structural diagram of the device. 2...Container, 3...Turntable, 6...Motor, 12...Cradle, 12B...Groove, 13
... Semiconductor wafer, 14, 34 ... Cradle position selection device, 17, 37 ... Semiconductor wafer support device, 19A ... Support body.

Claims

[Claims for Utility Model Registration] A turntable rotatably disposed within a container; a cradle swingably disposed at a predetermined location on the turntable so as to be able to assume a vertical position and a horizontal position; A semiconductor wafer drying apparatus comprising: a cradle positioning device for swinging the cradle to appropriately take a vertical posture position or a horizontal posture position; and a driving device for rotationally driving the turntable; A plurality of grooves for accommodating semiconductor wafers are formed in the cradle, and a support body having a plurality of grooves for supporting semiconductor wafers formed on the upper surface is formed, and when the cradle is in a horizontal position, the support body is moved from the bottom of the cradle. 1. A semiconductor wafer drying device, comprising a semiconductor wafer support device that is retractable from inside a cradle.