JPH01174922U - - Google Patents
Info
- Publication number
- JPH01174922U JPH01174922U JP7138888U JP7138888U JPH01174922U JP H01174922 U JPH01174922 U JP H01174922U JP 7138888 U JP7138888 U JP 7138888U JP 7138888 U JP7138888 U JP 7138888U JP H01174922 U JPH01174922 U JP H01174922U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- cart
- film forming
- holder
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims 2
- 239000010408 film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
Description
第１図は本考案の一実施例による基板カートの
斜視図、第２図はその動作を説明するための図、
第３図は従来の基板カートをプラズマＣＶＤ装置
の成膜室内に搬送した場合の断面構成図、第４図
ａは従来の基板カートの構成を改良した場合の図
、第４図ｂはその一部拡大図である。
５……基板、３０……基板カート、３１……カ
ート台、３２ａ，３２ｂ……第１ヒンジ、３３ａ
，３３ｂ……ホルダ本体、３５ａ，３５ｂ……第
２ヒンジ、３６ａ，３６ｂ……基板ホルダ。
FIG. 1 is a perspective view of a board cart according to an embodiment of the present invention, FIG. 2 is a diagram for explaining its operation,
Figure 3 is a cross-sectional configuration diagram when a conventional substrate cart is transported into the film forming chamber of a plasma CVD apparatus, Figure 4a is a diagram of an improved configuration of the conventional substrate cart, and Figure 4b is one of them. It is an enlarged view of the part. 5... Board, 30... Board cart, 31... Cart stand, 32a, 32b... First hinge, 33a
, 33b...Holder body, 35a, 35b...Second hinge, 36a, 36b...Substrate holder.
Claims (1)
ための基板カートであつて、移動自在に設けられ
たカート台と、その下端が前記カート台の上面に
回動自在に装着され直立状態及び水平状態を取り
うるホルダ本体と、このホルダの切欠き部に回転
自在に装着され基板を着脱自在に保持する基板ホ
ルダとを備えたことを特徴とする薄膜形成装置の
基板カート。 A substrate cart for carrying substrates into and out of a film forming chamber of a thin film forming apparatus, which includes a movably provided cart stand, and a lower end of which is rotatably attached to the top surface of the cart stand, so that it can be placed in an upright position or in an upright position. 1. A substrate cart for a thin film forming apparatus, comprising: a holder body that can take a horizontal position; and a substrate holder that is rotatably attached to a notch of the holder and holds a substrate in a detachable manner.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7138888U JPH0650983Y2 (en) | 1988-05-30 | 1988-05-30 | Substrate cart for thin film forming equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7138888U JPH0650983Y2 (en) | 1988-05-30 | 1988-05-30 | Substrate cart for thin film forming equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01174922U true JPH01174922U (en) | 1989-12-13 |
| JPH0650983Y2 JPH0650983Y2 (en) | 1994-12-21 |
Family
ID=31296596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7138888U Expired - Lifetime JPH0650983Y2 (en) | 1988-05-30 | 1988-05-30 | Substrate cart for thin film forming equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0650983Y2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01313924A (en) * | 1988-06-13 | 1989-12-19 | Fuji Electric Co Ltd | Vertical type plasma cvd device |
| WO2009148087A1 (en) * | 2008-06-06 | 2009-12-10 | 株式会社アルバック | Apparatus for manufacturing thin film solar cell |
| JP2011124348A (en) * | 2009-12-09 | 2011-06-23 | Ulvac Japan Ltd | Substrate holder and substrate carrier |
| JP2012089589A (en) * | 2010-10-15 | 2012-05-10 | Ulvac Japan Ltd | Substrate holder and substrate transfer apparatus |
-
1988
- 1988-05-30 JP JP7138888U patent/JPH0650983Y2/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01313924A (en) * | 1988-06-13 | 1989-12-19 | Fuji Electric Co Ltd | Vertical type plasma cvd device |
| WO2009148087A1 (en) * | 2008-06-06 | 2009-12-10 | 株式会社アルバック | Apparatus for manufacturing thin film solar cell |
| JP5328786B2 (en) * | 2008-06-06 | 2013-10-30 | 株式会社アルバック | Thin film solar cell manufacturing equipment |
| TWI424579B (en) * | 2008-06-06 | 2014-01-21 | Ulvac Inc | Manufacturing device for thin-film solar cell |
| JP2011124348A (en) * | 2009-12-09 | 2011-06-23 | Ulvac Japan Ltd | Substrate holder and substrate carrier |
| JP2012089589A (en) * | 2010-10-15 | 2012-05-10 | Ulvac Japan Ltd | Substrate holder and substrate transfer apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0650983Y2 (en) | 1994-12-21 |