JPS63110024U - - Google Patents
Info
- Publication number
- JPS63110024U JPS63110024U JP153487U JP153487U JPS63110024U JP S63110024 U JPS63110024 U JP S63110024U JP 153487 U JP153487 U JP 153487U JP 153487 U JP153487 U JP 153487U JP S63110024 U JPS63110024 U JP S63110024U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- support portion
- substrate holder
- annular protrusion
- protrudes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 14
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
Description
第１図Ａは、この考案の基板ホルダの実施例を
示す斜視図、第１図Ｂは、この考案の基板ホルダ
を第１図Ａに示した―線に沿つて切つてとつ
て示す断面図、第２図は、この考案の基板ホルダ
の使用例を示す図、第３図Ａは、この考案の基板
ホルダの使用例と、この考案の基板ホルダの機能
とを説明するための図、第３図Ｂは、この考案の
基板ホルダを用いて形成した薄膜の膜厚分布の一
例を示す特性曲線図、第４図Ａ及びＢは従来の基
板ホルダを示す断面図及び平面図、第５図は、従
来の基板ホルダを用いて形成した薄膜の膜厚分布
を示す特性曲線図である。
２１……基板ホルダ、２３……支持部、２５…
…環状突起部。
FIG. 1A is a perspective view showing an embodiment of the substrate holder of this invention, and FIG. 1B is a cross-sectional view of the substrate holder of this invention taken along the line shown in FIG. 1A. , FIG. 2 is a diagram showing an example of use of the substrate holder of this invention, FIG. 3A is a diagram for explaining an example of use of the substrate holder of this invention and the function of the substrate holder of this invention FIG. 3B is a characteristic curve diagram showing an example of the film thickness distribution of a thin film formed using the substrate holder of this invention, FIGS. 4A and B are a cross-sectional view and a plan view showing a conventional substrate holder, and FIG. 5 1 is a characteristic curve diagram showing the film thickness distribution of a thin film formed using a conventional substrate holder. 21... Substrate holder, 23... Support part, 25...
...Annular protrusion.
Claims (1)
て、 基板裏面側を支持する支持部と、 前記基板の周囲に前記支持部から前記基板表面
より高い位置まで突出して設けられた環状突起部
と を具えたことを特徴とする基板ホルダ。[Claims for Utility Model Registration] A substrate holder for use during vapor phase growth, comprising: a support portion that supports the back side of the substrate; and a support portion provided around the substrate that protrudes from the support portion to a position higher than the surface of the substrate. 1. A substrate holder comprising: an annular protrusion;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP153487U JPS63110024U (en) | 1987-01-09 | 1987-01-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP153487U JPS63110024U (en) | 1987-01-09 | 1987-01-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63110024U true JPS63110024U (en) | 1988-07-15 |
Family
ID=30779532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP153487U Pending JPS63110024U (en) | 1987-01-09 | 1987-01-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63110024U (en) |
-
1987
- 1987-01-09 JP JP153487U patent/JPS63110024U/ja active Pending