JPS6260254U - - Google Patents
Info
- Publication number
- JPS6260254U JPS6260254U JP15023385U JP15023385U JPS6260254U JP S6260254 U JPS6260254 U JP S6260254U JP 15023385 U JP15023385 U JP 15023385U JP 15023385 U JP15023385 U JP 15023385U JP S6260254 U JPS6260254 U JP S6260254U
- Authority
- JP
- Japan
- Prior art keywords
- base plate
- film forming
- forming apparatus
- substrate holder
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図はこの考案の１実施例である成膜装置の
基板ホルダーの平面図、第２図、第３図はそれぞ
れ前記とは別な実施例装置の平面図、第４図は成
膜装置の１つであるプラズマＣＶＤ装置の一般的
な構成を示す模式図、第５図は従来の成膜装置の
基板ホルダーの平面図である。
２′……被成膜基板、３……基板ホルダー、３
′……台板、７……ヒータ板、１５……スリツト
、１５′……補助スリツト、１６……スリツト、
１７……連結部材。
Fig. 1 is a plan view of a substrate holder of a film forming apparatus which is an embodiment of this invention, Figs. 2 and 3 are plan views of an embodiment of the apparatus different from the above, and Fig. 4 is a plan view of a film forming apparatus. FIG. 5 is a schematic diagram showing the general configuration of a plasma CVD apparatus, which is one of the conventional film forming apparatuses. 2'...Substrate to be film-formed, 3...Substrate holder, 3
'... Base plate, 7... Heater plate, 15... Slit, 15'... Auxiliary slit, 16... Slit,
17...Connecting member.
Claims (1)
の背面側に付設されたヒータ板とからなる成膜装
置の基板ホルダーにおいて、少くとも前記台板の
周辺部にスリツトもしくは溝を配設したことを特
徴とする成膜装置の基板ホルダー。 In a substrate holder of a film forming apparatus consisting of a base plate on which a substrate to be film-formed is placed and a heater plate attached to the back side of the base plate, slits or grooves are formed at least in the peripheral area of the base plate. A substrate holder for a film forming apparatus characterized by the following:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15023385U JPS6260254U (en) | 1985-09-30 | 1985-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15023385U JPS6260254U (en) | 1985-09-30 | 1985-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6260254U true JPS6260254U (en) | 1987-04-14 |
Family
ID=31066188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15023385U Pending JPS6260254U (en) | 1985-09-30 | 1985-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6260254U (en) |
-
1985
- 1985-09-30 JP JP15023385U patent/JPS6260254U/ja active Pending