JPS6157515U - - Google Patents
Info
- Publication number
- JPS6157515U JPS6157515U JP14240284U JP14240284U JPS6157515U JP S6157515 U JPS6157515 U JP S6157515U JP 14240284 U JP14240284 U JP 14240284U JP 14240284 U JP14240284 U JP 14240284U JP S6157515 U JPS6157515 U JP S6157515U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- groove
- molecular beam
- substrate holder
- metal wire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図は従来例を示す模式図、第２図乃至第５
図は本考案の一実施例を示し、第２図ａ及び第３
図は平面図、第２図ｂは断面図、第４図は要部拡
大断面図、第５図は斜視図である。
１１…基板ホルダ、１２…金属線、１３…溝、
１５…基板。
Figure 1 is a schematic diagram showing a conventional example, Figures 2 to 5
The figures show one embodiment of the present invention, and Figures 2a and 3
The figure is a plan view, FIG. 2b is a sectional view, FIG. 4 is an enlarged sectional view of a main part, and FIG. 5 is a perspective view. 11... Substrate holder, 12... Metal wire, 13... Groove,
15...Substrate.
Claims (1)
用いて結晶を成長せしめるための装置であつて、
上記基板ホルダの上記基板を固着する一主面には
溝が形成されると共に該溝内には着脱自在に金属
線が挿入されていることを特徴とする分子線エピ
タキシヤル成長装置。 An apparatus for fixing a substrate to a substrate holder and growing a crystal on the substrate using a molecular beam,
A molecular beam epitaxial growth apparatus characterized in that a groove is formed in one principal surface of the substrate holder to which the substrate is fixed, and a metal wire is detachably inserted into the groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14240284U JPH0238442Y2 (en) | 1984-09-20 | 1984-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14240284U JPH0238442Y2 (en) | 1984-09-20 | 1984-09-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6157515U true JPS6157515U (en) | 1986-04-17 |
| JPH0238442Y2 JPH0238442Y2 (en) | 1990-10-17 |
Family
ID=30700724
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14240284U Expired JPH0238442Y2 (en) | 1984-09-20 | 1984-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0238442Y2 (en) |
-
1984
- 1984-09-20 JP JP14240284U patent/JPH0238442Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0238442Y2 (en) | 1990-10-17 |