JPS6273534U - - Google Patents
Info
- Publication number
- JPS6273534U JPS6273534U JP16392585U JP16392585U JPS6273534U JP S6273534 U JPS6273534 U JP S6273534U JP 16392585 U JP16392585 U JP 16392585U JP 16392585 U JP16392585 U JP 16392585U JP S6273534 U JPS6273534 U JP S6273534U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- segments
- semiconductor substrate
- utility
- combination
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 238000007796 conventional method Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図ａ、第２図ｂ、第３図ａ、第４図ａは本
考案一実施例を示す平面図、第１図ｂ、第２図ｂ
、第３図ｂ、第４図ｂは同断面図、第５図ａは従
来の一例を示す平面図、ｂは同断面図、第６図は
気相成長装置の一例を示す断面図である。
８……サセプター、８１〜８ｎ……セグメント
。
Figure 1a, Figure 2b, Figure 3a, Figure 4a are plan views showing one embodiment of the present invention, Figure 1b, Figure 2b.
, FIG. 3b and FIG. 4b are the same sectional views, FIG. 5a is a plan view showing an example of the conventional method, b is the same sectional view, and FIG. . 8... Susceptor , 81-8n ...Segment.
Claims (1)
のセグメントの組合せにて構成したことを特徴と
する気相成長用サセプター。 A susceptor for vapor phase growth, characterized in that a susceptor body on which a semiconductor substrate is placed is configured by a combination of two or more segments.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16392585U JPS6273534U (en) | 1985-10-25 | 1985-10-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16392585U JPS6273534U (en) | 1985-10-25 | 1985-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6273534U true JPS6273534U (en) | 1987-05-11 |
Family
ID=31092573
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16392585U Pending JPS6273534U (en) | 1985-10-25 | 1985-10-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6273534U (en) |
-
1985
- 1985-10-25 JP JP16392585U patent/JPS6273534U/ja active Pending