JPS6194557U - - Google Patents
Info
- Publication number
- JPS6194557U JPS6194557U JP17766284U JP17766284U JPS6194557U JP S6194557 U JPS6194557 U JP S6194557U JP 17766284 U JP17766284 U JP 17766284U JP 17766284 U JP17766284 U JP 17766284U JP S6194557 U JPS6194557 U JP S6194557U
- Authority
- JP
- Japan
- Prior art keywords
- substrate holder
- substrate
- base
- sputtering device
- frame materials
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 11
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims 2
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は、この考案の１実施例を示すサーマル
スパツタ装置の基板ホルダーの平面図、第２図は
、第１図の基板ホルダーを−線で切断した断
面図、第３図は、従来のサーマルスパツタ装置の
基板ホルダーの平面図、第４図は、第３図の基板
ホルダーを−線で切断した断面図である。
１１：基台、１２：基板、１３：基板ホルダ。
Fig. 1 is a plan view of a substrate holder of a thermal sputtering device showing one embodiment of this invention, Fig. 2 is a sectional view of the substrate holder of Fig. 1 taken along the - line, and Fig. 3 is a conventional FIG. 4 is a plan view of the substrate holder of the thermal sputtering apparatus shown in FIG. 4, which is a cross-sectional view of the substrate holder of FIG. 11: Base, 12: Substrate, 13: Substrate holder.
Claims (1)
するためのサーマルスパツタ装置の基板ホルダー
であつて、 断面コ字状で、かつ長手状に形成される２本の
枠材から構成され、この２本の枠材で基板を包持
するようにしたことを特徴とするサーマルスパツ
タ装置の基板ホルダー。[Claims for Utility Model Registration] A substrate holder for a thermal sputtering device for holding a substrate placed on a base on the base, the substrate holder having a U-shaped cross section and a longitudinal shape. A substrate holder for a thermal sputtering device, characterized in that it is composed of two frame materials, and the substrate is held between the two frame materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17766284U JPS6194557U (en) | 1984-11-22 | 1984-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17766284U JPS6194557U (en) | 1984-11-22 | 1984-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6194557U true JPS6194557U (en) | 1986-06-18 |
Family
ID=30735232
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17766284U Pending JPS6194557U (en) | 1984-11-22 | 1984-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6194557U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5615261B2 (en) * | 1973-06-04 | 1981-04-09 |
-
1984
- 1984-11-22 JP JP17766284U patent/JPS6194557U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5615261B2 (en) * | 1973-06-04 | 1981-04-09 |