JPS6150775U - - Google Patents
Info
- Publication number
- JPS6150775U JPS6150775U JP13524184U JP13524184U JPS6150775U JP S6150775 U JPS6150775 U JP S6150775U JP 13524184 U JP13524184 U JP 13524184U JP 13524184 U JP13524184 U JP 13524184U JP S6150775 U JPS6150775 U JP S6150775U
- Authority
- JP
- Japan
- Prior art keywords
- cut grooves
- graphite
- heating element
- pulling
- fitted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 229910002804 graphite Inorganic materials 0.000 claims description 6
- 239000010439 graphite Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 239000013078 crystal Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
Landscapes
- Surface Heating Bodies (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
第１図は、本考案の黒鉛発熱体を例示した斜視
図、第２図は黒鉛片の形状の一実施態様を示す正
面図Ａおよび側面図Ｂである。
１……黒鉛発熱体、２……スリツト、３……切
り溝、５……黒鉛片。
FIG. 1 is a perspective view illustrating a graphite heating element of the present invention, and FIG. 2 is a front view A and a side view B showing one embodiment of the shape of a graphite piece. 1... graphite heating element, 2... slit, 3... cut groove, 5... graphite piece.
Claims (1)
一部または全部に黒鉛片５を嵌脱して成ることを
特徴とするシリコン単結晶引上げ用黒鉛発熱体。 A graphite heating element for pulling a silicon single crystal, characterized in that a plurality of cut grooves 3 are provided on the outer circumferential surface, and graphite pieces 5 are fitted into and removed from part or all of the cut grooves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984135241U JPS6329742Y2 (en) | 1984-09-07 | 1984-09-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984135241U JPS6329742Y2 (en) | 1984-09-07 | 1984-09-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6150775U true JPS6150775U (en) | 1986-04-05 |
| JPS6329742Y2 JPS6329742Y2 (en) | 1988-08-09 |
Family
ID=30693740
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984135241U Expired JPS6329742Y2 (en) | 1984-09-07 | 1984-09-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6329742Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003522086A (en) * | 1998-06-26 | 2003-07-22 | エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッド | Electric resistance heater for crystal growth apparatus and method of using the same |
| JP2014062004A (en) * | 2012-09-20 | 2014-04-10 | Ibiden Co Ltd | Graphite heater |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5167536A (en) * | 1974-12-09 | 1976-06-11 | Japan Radio Co Ltd | ITAJOHIITAA |
-
1984
- 1984-09-07 JP JP1984135241U patent/JPS6329742Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5167536A (en) * | 1974-12-09 | 1976-06-11 | Japan Radio Co Ltd | ITAJOHIITAA |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003522086A (en) * | 1998-06-26 | 2003-07-22 | エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッド | Electric resistance heater for crystal growth apparatus and method of using the same |
| JP2014062004A (en) * | 2012-09-20 | 2014-04-10 | Ibiden Co Ltd | Graphite heater |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6329742Y2 (en) | 1988-08-09 |