JPS6370140U - - Google Patents
Info
- Publication number
- JPS6370140U JPS6370140U JP16338386U JP16338386U JPS6370140U JP S6370140 U JPS6370140 U JP S6370140U JP 16338386 U JP16338386 U JP 16338386U JP 16338386 U JP16338386 U JP 16338386U JP S6370140 U JPS6370140 U JP S6370140U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- axis direction
- crystal axis
- flat
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000013078 crystal Substances 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図Ａは本考案に係る半導体ウエーハの第１
の具体例を示す底面図であり、第１図Ｂはその正
面図である。また第１図Ｃは、第１の具体例にお
ける結晶軸方向表示部位の形成要領の説明図であ
る。第２図Ａは本考案に係る半導体ウエーハの第
２の具体例を示す底面図であり、第２図Ｂはその
正面図である。また第２図Ｃは、第２の具体例に
おける結晶軸方向表示部位の形成要領の説明図で
ある。また第３図は在来の半導体ウエーハの斜視
図であり、第４図はキヤリヤ内に収納された在来
の半導体ウエーハの正面図である。
１１……半導体ウエーハ、１５……結晶軸方向
表示部位〔溝〕、１８……結晶軸方向表示部位〔
段部〕。
FIG. 1A shows the first semiconductor wafer according to the present invention.
FIG. 1B is a bottom view showing a specific example, and FIG. 1B is a front view thereof. Further, FIG. 1C is an explanatory diagram of the formation procedure of the crystal axis direction display portion in the first specific example. FIG. 2A is a bottom view showing a second specific example of a semiconductor wafer according to the present invention, and FIG. 2B is a front view thereof. Moreover, FIG. 2C is an explanatory diagram of the formation procedure of the crystal axis direction display portion in the second specific example. 3 is a perspective view of a conventional semiconductor wafer, and FIG. 4 is a front view of a conventional semiconductor wafer housed in a carrier. 11...Semiconductor wafer, 15...Crystal axis direction display part [groove], 18...Crystal axis direction display part [
Danbe].
Claims (1)
ウエーハの裏面に、オリエンテーシヨン・フラツ
トに相当する結晶軸方向表示部位を設けたことを
特徴とする半導体ウエーハ。 1. A semiconductor wafer characterized in that a crystal axis direction indicating region corresponding to an orientation flat is provided on the back surface of a semiconductor wafer having a flat surface having a substantially circular outline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16338386U JPS6370140U (en) | 1986-10-23 | 1986-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16338386U JPS6370140U (en) | 1986-10-23 | 1986-10-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6370140U true JPS6370140U (en) | 1988-05-11 |
Family
ID=31091529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16338386U Pending JPS6370140U (en) | 1986-10-23 | 1986-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6370140U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58201621A (en) * | 1982-05-19 | 1983-11-24 | Hitachi Ltd | Foamed article with skin and manufacture thereof |
-
1986
- 1986-10-23 JP JP16338386U patent/JPS6370140U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58201621A (en) * | 1982-05-19 | 1983-11-24 | Hitachi Ltd | Foamed article with skin and manufacture thereof |