JPH02137040U - - Google Patents
Info
- Publication number
- JPH02137040U JPH02137040U JP4315789U JP4315789U JPH02137040U JP H02137040 U JPH02137040 U JP H02137040U JP 4315789 U JP4315789 U JP 4315789U JP 4315789 U JP4315789 U JP 4315789U JP H02137040 U JPH02137040 U JP H02137040U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- etching
- etching apparatus
- swinging
- containers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
Landscapes
- Weting (AREA)
Description
第１図は本考案の半導体ウエハのエツチング装
置の一実施例を示す断面図および平面図である。
１：回転円板、２：ビーカー、４：ウエハ、５
：シヤフト、６：駆動用モータ。
FIG. 1 is a sectional view and a plan view showing an embodiment of the semiconductor wafer etching apparatus of the present invention. 1: Rotating disk, 2: Beaker, 4: Wafer, 5
: Shaft, 6: Drive motor.
Claims (1)
半導体ウエハのエツチング装置において、前記半
導体ウエハおよびエツチング液を収納する複数個
の容器を積載する回転形円板と、該円板を任意速
度で偏心回転させ、前記容器を揺動して前記半導
体ウエハをエツチングする偏心駆動装置とよりな
ることを特徴とする半導体ウエハのエツチング装
置。 A semiconductor wafer etching apparatus for chemically etching a semiconductor wafer into a mirror-like surface, comprising: a rotating disk carrying a plurality of containers for storing the semiconductor wafer and an etching solution; the disk being eccentrically rotated at an arbitrary speed; A semiconductor wafer etching apparatus comprising an eccentric drive device for etching the semiconductor wafer by swinging the container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4315789U JPH02137040U (en) | 1989-04-13 | 1989-04-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4315789U JPH02137040U (en) | 1989-04-13 | 1989-04-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02137040U true JPH02137040U (en) | 1990-11-15 |
Family
ID=31555332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4315789U Pending JPH02137040U (en) | 1989-04-13 | 1989-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02137040U (en) |
-
1989
- 1989-04-13 JP JP4315789U patent/JPH02137040U/ja active Pending
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