JPH0217553U - - Google Patents

Info

Publication number
JPH0217553U
JPH0217553U JP9549688U JP9549688U JPH0217553U JP H0217553 U JPH0217553 U JP H0217553U JP 9549688 U JP9549688 U JP 9549688U JP 9549688 U JP9549688 U JP 9549688U JP H0217553 U JPH0217553 U JP H0217553U
Authority
JP
Japan
Prior art keywords
revolving
revolving member
axis
jig
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9549688U
Other languages
Japanese (ja)
Other versions
JPH0734928Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988095496U priority Critical patent/JPH0734928Y2/en
Publication of JPH0217553U publication Critical patent/JPH0217553U/ja
Application granted granted Critical
Publication of JPH0734928Y2 publication Critical patent/JPH0734928Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図はこの考案の一実施例の平面図、第２図
はその側面図、第３図は同じくその自転治具の平
面図、第４図は同じくその動作説明図、第５図は
第４図の部分拡大図、第６図は従来例の平面図、
第７図はその側面図、第８図は同じくその動作説
明図、第９図は同じくその作用説明図である。 １……主軸、２……公転部材、３……自転治具
、５……アーム、６……キツカ、Ｐ……公転軸、
Ｑ……自転軸。 Fig. 1 is a plan view of an embodiment of this invention, Fig. 2 is a side view thereof, Fig. 3 is a plan view of the rotating jig, Fig. 4 is an explanatory diagram of its operation, and Fig. 5 is a side view thereof. Figure 4 is a partially enlarged view, Figure 6 is a plan view of the conventional example,
FIG. 7 is a side view thereof, FIG. 8 is a diagram illustrating its operation, and FIG. 9 is a diagram illustrating its operation. 1...Main shaft, 2...Revolving member, 3...Rotating jig, 5...Arm, 6...Kitsuka, P...Revolving axis,
Q... Rotation axis.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 回転駆動される公転部材と、この公転部材の公
転軸と平行な自転軸で回転自在に前記公転部材に
設置されて処理物を保持可能な自転治具と、この
自転治具に自転軸を中心とする円の略接線方向に
延びて設けられた複数本のアームと、前記公転部
材の公転に伴つて前記自転治具の前記アームが当
たる位置に設けられたキツカとを備えた処理物保
持装置。 a revolving member that is rotationally driven; a revolving jig that is installed on the revolving member so as to be rotatable about an axis of rotation parallel to the revolving axis of the revolving member and capable of holding a processed material; A processing material holding device comprising: a plurality of arms extending substantially tangentially to a circle; and a stopper provided at a position where the arm of the rotating jig comes into contact as the revolving member revolves. .
JP1988095496U 1988-07-19 1988-07-19 Processed object holding device Expired - Lifetime JPH0734928Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988095496U JPH0734928Y2 (en) 1988-07-19 1988-07-19 Processed object holding device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988095496U JPH0734928Y2 (en) 1988-07-19 1988-07-19 Processed object holding device

Publications (2)

Publication Number Publication Date
JPH0217553U true JPH0217553U (en) 1990-02-05
JPH0734928Y2 JPH0734928Y2 (en) 1995-08-09

Family

ID=31320164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988095496U Expired - Lifetime JPH0734928Y2 (en) 1988-07-19 1988-07-19 Processed object holding device

Country Status (1)

Country Link
JP (1) JPH0734928Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005290425A (en) * 2004-03-31 2005-10-20 Tdk Corp Rotation mechanism of substrate in sputtering vapor deposition system
CN112964277A (en) * 2021-03-05 2021-06-15 中国电子科技集团公司第四十八研究所 Multi-station workpiece table of quartz harmonic oscillator flattening equipment

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10109517B1 (en) * 2018-01-10 2018-10-23 Lam Research Corporation Rotational indexer with additional rotational axes
WO2019210135A1 (en) 2018-04-28 2019-10-31 Applied Materials, Inc. In-situ wafer rotation for carousel processing chambers

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59190359A (en) * 1983-01-19 1984-10-29 マルチ−ア−ク・バキユ−ム・システムズ・インコ−ポレ−テツド Vacuum evaporation device frame supporting equipment

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59190359A (en) * 1983-01-19 1984-10-29 マルチ−ア−ク・バキユ−ム・システムズ・インコ−ポレ−テツド Vacuum evaporation device frame supporting equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005290425A (en) * 2004-03-31 2005-10-20 Tdk Corp Rotation mechanism of substrate in sputtering vapor deposition system
CN112964277A (en) * 2021-03-05 2021-06-15 中国电子科技集团公司第四十八研究所 Multi-station workpiece table of quartz harmonic oscillator flattening equipment

Also Published As

Publication number Publication date
JPH0734928Y2 (en) 1995-08-09

Similar Documents

Publication Publication Date Title
JPH0217553U (en)
JPS60119528U (en) Gripping device for cylindrical objects
JPH0280622U (en)
JPS61159151U (en)
JPS58196313U (en) positioning device
JPH01142452U (en)
JPH0378507U (en)
JPS60125006U (en) chucking device
JPH0165223U (en)
JPS6226164U (en)
JPH0380670U (en)
JPS62164405U (en)
JPH0213045U (en)
JPS6385599U (en)
JPS62150047U (en)
JPH01113874U (en)
JPH03106629U (en)
JPH0250729U (en)
JPS5874163U (en) Power tool rotation detection device
JPS6123320U (en) dust remover
JPS60194768U (en) Disk rotation drive device
JPS59173551U (en) Automatic polishing device
JPS63188264U (en)
JPS63144139U (en)
JPS6287433U (en)