JPS6287433U - - Google Patents
Info
- Publication number
- JPS6287433U JPS6287433U JP17818285U JP17818285U JPS6287433U JP S6287433 U JPS6287433 U JP S6287433U JP 17818285 U JP17818285 U JP 17818285U JP 17818285 U JP17818285 U JP 17818285U JP S6287433 U JPS6287433 U JP S6287433U
- Authority
- JP
- Japan
- Prior art keywords
- spin dryer
- rotating drum
- wafer carrier
- utility
- respect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Drying Of Solid Materials (AREA)
Description
第１図はこの考案の一実施例に係るスピンドラ
イヤの要部の説明図、第２図〜第４図は従来のス
ピンドライヤの説明図である。
図において、１は駆動部、２はケーシング、３
は回転ドラム、４はキヤリヤホルダ、５はウエハ
、６はウエハキヤリヤ、８は蓋である。なお、図
中同一符号は同一または相当部分を示す。
FIG. 1 is an explanatory diagram of the main parts of a spin dryer according to an embodiment of this invention, and FIGS. 2 to 4 are explanatory diagrams of a conventional spin dryer. In the figure, 1 is the drive unit, 2 is the casing, and 3
4 is a rotating drum, 4 is a carrier holder, 5 is a wafer, 6 is a wafer carrier, and 8 is a lid. Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
ドラムの回転方向に対して所定の角度をもつよう
に配置した事を特徴とするスピンドライヤ。 A spin dryer characterized in that a wafer carrier that holds processed wafers is arranged at a predetermined angle with respect to the rotation direction of a rotating drum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17818285U JPS6287433U (en) | 1985-11-21 | 1985-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17818285U JPS6287433U (en) | 1985-11-21 | 1985-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6287433U true JPS6287433U (en) | 1987-06-04 |
Family
ID=31120078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17818285U Pending JPS6287433U (en) | 1985-11-21 | 1985-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6287433U (en) |
-
1985
- 1985-11-21 JP JP17818285U patent/JPS6287433U/ja active Pending
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