JPS61149330U - - Google Patents
Info
- Publication number
- JPS61149330U JPS61149330U JP3170385U JP3170385U JPS61149330U JP S61149330 U JPS61149330 U JP S61149330U JP 3170385 U JP3170385 U JP 3170385U JP 3170385 U JP3170385 U JP 3170385U JP S61149330 U JPS61149330 U JP S61149330U
- Authority
- JP
- Japan
- Prior art keywords
- liquid tank
- rotating plate
- etching solution
- wafer
- cassette
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Description
第１図は本考案の一実施例の断面図である。
１：回転円板、２：中心軸、４：鉤、５：カセ
ツト、６：半導体ウエハ、７：ハンドル、９：液
槽、１０：エツチング液。
FIG. 1 is a sectional view of an embodiment of the present invention. 1: rotating disk, 2: central shaft, 4: hook, 5: cassette, 6: semiconductor wafer, 7: handle, 9: liquid tank, 10: etching liquid.
Claims (1)
にあつて水平軸の周りに鉛直面内に回転可能な回
転板と、該回転板の周囲に近い部分から下方に吊
り下げられ、半導体ウエハを前記エツチング液中
においてウエハ面を前記回転板面に平行にして支
持するカセツトとからなることを特徴とするエツ
チング装置。 A liquid tank containing an etching solution; a rotating plate located above the liquid tank and rotatable in a vertical plane around a horizontal axis; and a cassette that supports the wafer in the etching solution with the wafer surface parallel to the rotating plate surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3170385U JPS61149330U (en) | 1985-03-06 | 1985-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3170385U JPS61149330U (en) | 1985-03-06 | 1985-03-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61149330U true JPS61149330U (en) | 1986-09-16 |
Family
ID=30532545
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3170385U Pending JPS61149330U (en) | 1985-03-06 | 1985-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61149330U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0280339A (en) * | 1988-09-13 | 1990-03-20 | Furukawa Electric Co Ltd:The | Surface treatment of glass preform |
-
1985
- 1985-03-06 JP JP3170385U patent/JPS61149330U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0280339A (en) * | 1988-09-13 | 1990-03-20 | Furukawa Electric Co Ltd:The | Surface treatment of glass preform |
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