JPS62164347U - - Google Patents
Info
- Publication number
- JPS62164347U JPS62164347U JP1986052919U JP5291986U JPS62164347U JP S62164347 U JPS62164347 U JP S62164347U JP 1986052919 U JP1986052919 U JP 1986052919U JP 5291986 U JP5291986 U JP 5291986U JP S62164347 U JPS62164347 U JP S62164347U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning liquid
- support shaft
- passage
- liquid injection
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 10
- 238000002347 injection Methods 0.000 claims description 4
- 239000007924 injection Substances 0.000 claims description 4
Description
第１図ないし第３図は本考案の一実施例のマス
ク洗浄装置に係り、第１図はその一部断面平面図
、第２図はその一部断面側面図、第３図は第２図
の―線に沿う横断面図である。第４図および
第５図は従来例に係り、第４図はその一部断面平
面図、第５図はその一部断面側面図である。
１１……マスクホルダー、１２……支持軸、１
６……アーム、１７……洗浄液通路、１９……洗
浄液射出孔、２２……洗浄液供給路。
1 to 3 relate to a mask cleaning device according to an embodiment of the present invention, in which FIG. 1 is a partially sectional plan view thereof, FIG. 2 is a partially sectional side view thereof, and FIG. 3 is a partially sectional side view thereof. FIG. 4 and 5 relate to a conventional example, with FIG. 4 being a partially sectional plan view thereof, and FIG. 5 being a partially sectional side view thereof. 11...Mask holder, 12...Support shaft, 1
6...Arm, 17...Cleaning liquid passage, 19...Cleaning liquid injection hole, 22...Cleaning liquid supply path.
Claims (1)
転する支持軸と、アームの表面に多数の洗浄液射
出孔が開口するとともにその内部に前記洗浄液射
出孔に通じる洗浄液通路が形成されたマスクホル
ダーとを備え、 かつ前記マスクホルダーが前記支持軸とともに
回転するように設けられ、前記洗浄液供給路と前
記洗浄液通路とが連通接続されていることを特徴
とするマスク洗浄装置。[Claims for Utility Model Registration] A support shaft having a cleaning liquid supply path formed therein and rotating around a vertical axis, a cleaning liquid injection hole having a large number of cleaning liquid injection holes on the surface of the arm, and a cleaning liquid communicating with the cleaning liquid injection holes inside the support shaft. A mask cleaning device comprising: a mask holder in which a passage is formed; the mask holder is provided to rotate together with the support shaft; and the cleaning liquid supply passage and the cleaning liquid passage are connected to each other. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986052919U JPH0334750Y2 (en) | 1986-04-09 | 1986-04-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986052919U JPH0334750Y2 (en) | 1986-04-09 | 1986-04-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62164347U true JPS62164347U (en) | 1987-10-19 |
| JPH0334750Y2 JPH0334750Y2 (en) | 1991-07-23 |
Family
ID=30878511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986052919U Expired JPH0334750Y2 (en) | 1986-04-09 | 1986-04-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0334750Y2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009194167A (en) * | 2008-02-14 | 2009-08-27 | Tokyo Electron Ltd | Liquid processing apparatus |
| JP2012169572A (en) * | 2011-02-17 | 2012-09-06 | Tokyo Electron Ltd | Substrate cleaning apparatus |
| JP2016111302A (en) * | 2014-12-10 | 2016-06-20 | 株式会社Ｓｃｒｅｅｎホールディングス | Substrate processing apparatus |
-
1986
- 1986-04-09 JP JP1986052919U patent/JPH0334750Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009194167A (en) * | 2008-02-14 | 2009-08-27 | Tokyo Electron Ltd | Liquid processing apparatus |
| JP2012169572A (en) * | 2011-02-17 | 2012-09-06 | Tokyo Electron Ltd | Substrate cleaning apparatus |
| JP2016111302A (en) * | 2014-12-10 | 2016-06-20 | 株式会社Ｓｃｒｅｅｎホールディングス | Substrate processing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0334750Y2 (en) | 1991-07-23 |
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