JPH0299970U - - Google Patents
Info
- Publication number
- JPH0299970U JPH0299970U JP577189U JP577189U JPH0299970U JP H0299970 U JPH0299970 U JP H0299970U JP 577189 U JP577189 U JP 577189U JP 577189 U JP577189 U JP 577189U JP H0299970 U JPH0299970 U JP H0299970U
- Authority
- JP
- Japan
- Prior art keywords
- jet
- supports
- utility
- plating
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007747 plating Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 2
Landscapes
- Electroplating Methods And Accessories (AREA)
Description
第１図は本考案の実施例１を示す断面図、第２
図は本考案の実施例２を示す断面図である。
１…ウエハ支持ピン、２…排出口、３…ガイド
ピン、４…メツキ液、５…噴流カツプ、６…ウエ
ハ、７…電極、８…ウエハ支持ピン、９…排出口
、１０…ガイドピン、１１…噴流カツプ。
Fig. 1 is a sectional view showing the first embodiment of the present invention;
The figure is a sectional view showing a second embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Wafer support pin, 2... Discharge port, 3... Guide pin, 4... Plating liquid, 5... Jet cup, 6... Wafer, 7... Electrode, 8... Wafer support pin, 9... Discharge port, 10... Guide pin, 11... Jet cup.
Claims (1)
勢に支える噴流カツプを有することを特徴とする
噴流式メツキ装置。 A jet plating device characterized by having a jet cup that supports a wafer pushed up by a jet of plating liquid in an inclined position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP577189U JPH0299970U (en) | 1989-01-20 | 1989-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP577189U JPH0299970U (en) | 1989-01-20 | 1989-01-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0299970U true JPH0299970U (en) | 1990-08-09 |
Family
ID=31209431
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP577189U Pending JPH0299970U (en) | 1989-01-20 | 1989-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0299970U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001316871A (en) * | 2000-05-08 | 2001-11-16 | Tokyo Electron Ltd | Method and equipment for liquid treatment |
-
1989
- 1989-01-20 JP JP577189U patent/JPH0299970U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001316871A (en) * | 2000-05-08 | 2001-11-16 | Tokyo Electron Ltd | Method and equipment for liquid treatment |