JPS6426836U - - Google Patents
Info
- Publication number
- JPS6426836U JPS6426836U JP12130287U JP12130287U JPS6426836U JP S6426836 U JPS6426836 U JP S6426836U JP 12130287 U JP12130287 U JP 12130287U JP 12130287 U JP12130287 U JP 12130287U JP S6426836 U JPS6426836 U JP S6426836U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- etching
- etching apparatus
- chemical
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 3
- 239000007921 spray Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- 238000003486 chemical etching Methods 0.000 claims 2
- 238000004140 cleaning Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Weting (AREA)
Description
第１図は本考案の一実施例の概略断面図である
。
１……エツチング槽、２……スプレーノズル。
FIG. 1 is a schematic sectional view of an embodiment of the present invention. 1...Etching tank, 2...Spray nozzle.
Claims (1)
導体基板薬液エツチング装置において、エツチン
グ槽の内壁をスプレー洗浄するスプレーノズルが
設けられていることを特徴とする半導体基板エツ
チング装置。 1. A semiconductor substrate chemical etching apparatus for etching a semiconductor substrate with a chemical solution, characterized in that the semiconductor substrate chemical etching apparatus is provided with a spray nozzle for spray cleaning an inner wall of an etching tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12130287U JPS6426836U (en) | 1987-08-06 | 1987-08-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12130287U JPS6426836U (en) | 1987-08-06 | 1987-08-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6426836U true JPS6426836U (en) | 1989-02-15 |
Family
ID=31368185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12130287U Pending JPS6426836U (en) | 1987-08-06 | 1987-08-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6426836U (en) |
-
1987
- 1987-08-06 JP JP12130287U patent/JPS6426836U/ja active Pending