JPS62157148U - - Google Patents
Info
- Publication number
- JPS62157148U JPS62157148U JP4405486U JP4405486U JPS62157148U JP S62157148 U JPS62157148 U JP S62157148U JP 4405486 U JP4405486 U JP 4405486U JP 4405486 U JP4405486 U JP 4405486U JP S62157148 U JPS62157148 U JP S62157148U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- chuck
- suction chuck
- wafer suction
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007599 discharging Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Jigs For Machine Tools (AREA)
Description
第１図ａは、本考案の真空式ウエハ吸着チヤツ
クの構造の実施例を示す平面図。第１図ｂは、同
じく本考案の実施例の正面断面図。第２図ａは、
従来例の真空式ウエハ吸着チヤツクの構造を示す
平面図。第２図ｂは、同じく従来例の正面断面図
。
１……チヤツク部材、２……真空穴、３……真
空溝。
FIG. 1a is a plan view showing an embodiment of the structure of the vacuum type wafer suction chuck of the present invention. FIG. 1b is a front sectional view of the embodiment of the present invention. Figure 2 a is
FIG. 2 is a plan view showing the structure of a conventional vacuum type wafer suction chuck. FIG. 2b is a front sectional view of the conventional example. 1...chuck member, 2...vacuum hole, 3...vacuum groove.
Claims (1)
いは薬液を吐出する装置に使用する真空式ウエハ
吸着チヤツクにおいて、真空穴をチヤツク周辺部
に配置した事を特徴とする真空式ウエハ吸着チヤ
ツクの構造。 A vacuum wafer suction chuck is used in a device for discharging water or chemical liquid onto a wafer in the semiconductor manufacturing process, and the structure of the vacuum wafer suction chuck is characterized by having vacuum holes arranged around the chuck.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4405486U JPS62157148U (en) | 1986-03-26 | 1986-03-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4405486U JPS62157148U (en) | 1986-03-26 | 1986-03-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62157148U true JPS62157148U (en) | 1987-10-06 |
Family
ID=30861497
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4405486U Pending JPS62157148U (en) | 1986-03-26 | 1986-03-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62157148U (en) |
-
1986
- 1986-03-26 JP JP4405486U patent/JPS62157148U/ja active Pending